11/21/2012	10:24:49 AM	Main Vac valve closed
11/21/2012	10:25:01 AM	Main Vac valve opened
11/21/2012	10:26:38 AM	Recipe started at 10:26 AM
11/21/2012	10:26:38 AM	Helium valve closed
11/21/2012	10:26:38 AM	H2 valve closed
11/21/2012	10:26:38 AM	BCl3 valve closed
11/21/2012	10:26:38 AM	PH3 valve closed
11/21/2012	10:26:38 AM	SiCl4 pre valve closed
11/21/2012	10:26:38 AM	SiCl4 post valve closed
11/21/2012	10:26:38 AM	Main Vac valve closed
11/21/2012	10:26:38 AM	Bypass valve closed
11/21/2012	10:26:38 AM	Bubbler valve closed
11/21/2012	10:26:38 AM	Helium MFC set to  0.000000
11/21/2012	10:26:38 AM	H2 MFC set to  0.000000
11/21/2012	10:26:38 AM	BCl3 MFC set to  0.000000
11/21/2012	10:26:38 AM	PH3 MFC set to  0.000000
11/21/2012	10:26:38 AM	SiCl4 MFC set to  0.000000
11/21/2012	10:26:38 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	10:26:38 AM	Tube furnace set to 0
11/21/2012	10:26:41 AM	Helium valve closed
11/21/2012	10:26:41 AM	BCl3 valve closed
11/21/2012	10:26:41 AM	PH3 valve closed
11/21/2012	10:26:41 AM	SiCl4 pre valve closed
11/21/2012	10:26:41 AM	SiCl4 post valve closed
11/21/2012	10:26:41 AM	Main Vac valve closed
11/21/2012	10:26:41 AM	Bypass valve closed
11/21/2012	10:26:41 AM	Bubbler valve closed
11/21/2012	10:26:41 AM	H2 valve opened
11/21/2012	10:26:41 AM	Helium MFC set to  0.000000
11/21/2012	10:26:41 AM	H2 MFC set to  500.000000
11/21/2012	10:26:41 AM	BCl3 MFC set to  0.000000
11/21/2012	10:26:41 AM	PH3 MFC set to  0.000000
11/21/2012	10:26:41 AM	SiCl4 MFC set to  0.000000
11/21/2012	10:26:41 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	10:26:41 AM	Tube furnace set to 0
11/21/2012	10:27:53 AM	Helium valve closed
11/21/2012	10:27:53 AM	BCl3 valve closed
11/21/2012	10:27:53 AM	PH3 valve closed
11/21/2012	10:27:53 AM	SiCl4 pre valve closed
11/21/2012	10:27:53 AM	SiCl4 post valve closed
11/21/2012	10:27:53 AM	Main Vac valve closed
11/21/2012	10:27:53 AM	Bypass valve closed
11/21/2012	10:27:53 AM	H2 valve opened
11/21/2012	10:27:53 AM	Bubbler valve opened
11/21/2012	10:27:53 AM	Helium MFC set to  0.000000
11/21/2012	10:27:53 AM	H2 MFC set to  500.000000
11/21/2012	10:27:53 AM	BCl3 MFC set to  0.000000
11/21/2012	10:27:53 AM	PH3 MFC set to  0.000000
11/21/2012	10:27:53 AM	SiCl4 MFC set to  0.000000
11/21/2012	10:27:53 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	10:27:54 AM	Tube furnace set to 0
11/21/2012	10:27:55 AM	Helium valve closed
11/21/2012	10:27:55 AM	BCl3 valve closed
11/21/2012	10:27:55 AM	PH3 valve closed
11/21/2012	10:27:55 AM	SiCl4 pre valve closed
11/21/2012	10:27:55 AM	SiCl4 post valve closed
11/21/2012	10:27:55 AM	Main Vac valve closed
11/21/2012	10:27:55 AM	Bypass valve closed
11/21/2012	10:27:55 AM	H2 valve opened
11/21/2012	10:27:55 AM	Bubbler valve opened
11/21/2012	10:27:55 AM	Helium MFC set to  0.000000
11/21/2012	10:27:55 AM	H2 MFC set to  450.000000
11/21/2012	10:27:55 AM	BCl3 MFC set to  0.000000
11/21/2012	10:27:55 AM	PH3 MFC set to  0.000000
11/21/2012	10:27:55 AM	SiCl4 MFC set to  0.000000
11/21/2012	10:27:55 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	10:27:55 AM	Tube furnace set to 1000
11/21/2012	10:52:55 AM	Helium valve closed
11/21/2012	10:52:55 AM	PH3 valve closed
11/21/2012	10:52:55 AM	Main Vac valve closed
11/21/2012	10:52:55 AM	Bypass valve closed
11/21/2012	10:52:55 AM	H2 valve opened
11/21/2012	10:52:55 AM	BCl3 valve opened
11/21/2012	10:52:55 AM	SiCl4 pre valve opened
11/21/2012	10:52:55 AM	SiCl4 post valve opened
11/21/2012	10:52:55 AM	Bubbler valve opened
11/21/2012	10:52:55 AM	Helium MFC set to  0.000000
11/21/2012	10:52:55 AM	H2 MFC set to  450.000000
11/21/2012	10:52:55 AM	BCl3 MFC set to  1.500000
11/21/2012	10:52:55 AM	PH3 MFC set to  0.000000
11/21/2012	10:52:55 AM	SiCl4 MFC set to  50.000000
11/21/2012	10:52:55 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	10:52:55 AM	Tube furnace set to 1000
11/21/2012	11:00:55 AM	Helium valve closed
11/21/2012	11:00:55 AM	BCl3 valve closed
11/21/2012	11:00:55 AM	PH3 valve closed
11/21/2012	11:00:55 AM	SiCl4 pre valve closed
11/21/2012	11:00:55 AM	SiCl4 post valve closed
11/21/2012	11:00:55 AM	Main Vac valve closed
11/21/2012	11:00:55 AM	Bypass valve closed
11/21/2012	11:00:55 AM	H2 valve opened
11/21/2012	11:00:55 AM	Bubbler valve opened
11/21/2012	11:00:55 AM	Helium MFC set to  0.000000
11/21/2012	11:00:55 AM	H2 MFC set to  500.000000
11/21/2012	11:00:55 AM	BCl3 MFC set to  0.000000
11/21/2012	11:00:55 AM	PH3 MFC set to  0.000000
11/21/2012	11:00:55 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:00:55 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:00:55 AM	Tube furnace set to 750
11/21/2012	11:05:55 AM	H2 valve closed
11/21/2012	11:05:55 AM	BCl3 valve closed
11/21/2012	11:05:55 AM	PH3 valve closed
11/21/2012	11:05:55 AM	SiCl4 pre valve closed
11/21/2012	11:05:55 AM	SiCl4 post valve closed
11/21/2012	11:05:55 AM	Main Vac valve closed
11/21/2012	11:05:55 AM	Bypass valve closed
11/21/2012	11:05:55 AM	Helium valve opened
11/21/2012	11:05:55 AM	Bubbler valve opened
11/21/2012	11:05:55 AM	Helium MFC set to  500.000000
11/21/2012	11:05:55 AM	H2 MFC set to  0.000000
11/21/2012	11:05:55 AM	BCl3 MFC set to  0.000000
11/21/2012	11:05:55 AM	PH3 MFC set to  0.000000
11/21/2012	11:05:55 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:05:55 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:05:55 AM	Tube furnace set to 0
11/21/2012	11:16:24 AM	Helium valve closed
11/21/2012	11:16:24 AM	H2 valve closed
11/21/2012	11:16:24 AM	BCl3 valve closed
11/21/2012	11:16:24 AM	PH3 valve closed
11/21/2012	11:16:24 AM	SiCl4 pre valve closed
11/21/2012	11:16:24 AM	SiCl4 post valve closed
11/21/2012	11:16:24 AM	Main Vac valve closed
11/21/2012	11:16:24 AM	Bypass valve closed
11/21/2012	11:16:24 AM	Bubbler valve closed
11/21/2012	11:16:24 AM	Helium MFC set to  0.000000
11/21/2012	11:16:24 AM	H2 MFC set to  0.000000
11/21/2012	11:16:24 AM	BCl3 MFC set to  0.000000
11/21/2012	11:16:24 AM	PH3 MFC set to  0.000000
11/21/2012	11:16:24 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:16:24 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:16:24 AM	Tube furnace set to 0
11/21/2012	11:16:25 AM	Run finished at 11:16 AM
11/21/2012	11:16:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2012	11:16:38 AM	Recipe started at 11:16 AM
11/21/2012	11:16:38 AM	Helium valve closed
11/21/2012	11:16:38 AM	H2 valve closed
11/21/2012	11:16:38 AM	BCl3 valve closed
11/21/2012	11:16:38 AM	PH3 valve closed
11/21/2012	11:16:38 AM	SiCl4 pre valve closed
11/21/2012	11:16:38 AM	SiCl4 post valve closed
11/21/2012	11:16:38 AM	Main Vac valve closed
11/21/2012	11:16:38 AM	Bypass valve closed
11/21/2012	11:16:38 AM	Bubbler valve closed
11/21/2012	11:16:38 AM	Helium MFC set to  0.000000
11/21/2012	11:16:38 AM	H2 MFC set to  0.000000
11/21/2012	11:16:39 AM	BCl3 MFC set to  0.000000
11/21/2012	11:16:39 AM	PH3 MFC set to  0.000000
11/21/2012	11:16:39 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:16:39 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:16:39 AM	Tube furnace set to 0
11/21/2012	11:16:42 AM	H2 valve closed
11/21/2012	11:16:42 AM	BCl3 valve closed
11/21/2012	11:16:42 AM	PH3 valve closed
11/21/2012	11:16:42 AM	SiCl4 pre valve closed
11/21/2012	11:16:42 AM	SiCl4 post valve closed
11/21/2012	11:16:42 AM	Main Vac valve closed
11/21/2012	11:16:42 AM	Bypass valve closed
11/21/2012	11:16:42 AM	Bubbler valve closed
11/21/2012	11:16:42 AM	Helium valve opened
11/21/2012	11:16:42 AM	Helium MFC set to  500.000000
11/21/2012	11:16:42 AM	H2 MFC set to  0.000000
11/21/2012	11:16:42 AM	BCl3 MFC set to  0.000000
11/21/2012	11:16:42 AM	PH3 MFC set to  0.000000
11/21/2012	11:16:42 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:16:42 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:16:42 AM	Tube furnace set to 0
11/21/2012	11:16:42 AM	Helium valve closed
11/21/2012	11:16:42 AM	H2 valve closed
11/21/2012	11:16:42 AM	BCl3 valve closed
11/21/2012	11:16:42 AM	PH3 valve closed
11/21/2012	11:16:42 AM	SiCl4 pre valve closed
11/21/2012	11:16:42 AM	SiCl4 post valve closed
11/21/2012	11:16:42 AM	Main Vac valve closed
11/21/2012	11:16:42 AM	Bypass valve closed
11/21/2012	11:16:42 AM	Bubbler valve closed
11/21/2012	11:16:42 AM	Helium MFC set to  0.000000
11/21/2012	11:16:42 AM	H2 MFC set to  0.000000
11/21/2012	11:16:42 AM	BCl3 MFC set to  0.000000
11/21/2012	11:16:42 AM	PH3 MFC set to  0.000000
11/21/2012	11:16:42 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:16:42 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:16:42 AM	Tube furnace set to 0
11/21/2012	11:16:43 AM	Run finished at 11:16 AM
11/21/2012	11:16:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2012	11:21:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2012	11:21:43 AM	Recipe started at 11:21 AM
11/21/2012	11:21:43 AM	Helium valve closed
11/21/2012	11:21:43 AM	H2 valve closed
11/21/2012	11:21:43 AM	BCl3 valve closed
11/21/2012	11:21:43 AM	PH3 valve closed
11/21/2012	11:21:43 AM	SiCl4 pre valve closed
11/21/2012	11:21:43 AM	SiCl4 post valve closed
11/21/2012	11:21:43 AM	Main Vac valve closed
11/21/2012	11:21:43 AM	Bubbler valve closed
11/21/2012	11:21:43 AM	Bypass valve opened
11/21/2012	11:21:43 AM	Helium MFC set to  0.000000
11/21/2012	11:21:43 AM	H2 MFC set to  0.000000
11/21/2012	11:21:43 AM	BCl3 MFC set to  0.000000
11/21/2012	11:21:43 AM	PH3 MFC set to  0.000000
11/21/2012	11:21:43 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:21:43 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:21:44 AM	Tube furnace set to 0
11/21/2012	11:22:51 AM	Helium valve closed
11/21/2012	11:22:51 AM	H2 valve closed
11/21/2012	11:22:51 AM	BCl3 valve closed
11/21/2012	11:22:51 AM	PH3 valve closed
11/21/2012	11:22:51 AM	SiCl4 pre valve closed
11/21/2012	11:22:51 AM	SiCl4 post valve closed
11/21/2012	11:22:51 AM	Main Vac valve closed
11/21/2012	11:22:51 AM	Bubbler valve closed
11/21/2012	11:22:51 AM	Bypass valve opened
11/21/2012	11:22:51 AM	Helium MFC set to  0.000000
11/21/2012	11:22:51 AM	H2 MFC set to  0.000000
11/21/2012	11:22:51 AM	BCl3 MFC set to  0.000000
11/21/2012	11:22:51 AM	PH3 MFC set to  0.000000
11/21/2012	11:22:51 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:22:51 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:22:51 AM	Tube furnace set to 0
11/21/2012	11:23:51 AM	Helium valve closed
11/21/2012	11:23:51 AM	H2 valve closed
11/21/2012	11:23:51 AM	BCl3 valve closed
11/21/2012	11:23:51 AM	PH3 valve closed
11/21/2012	11:23:51 AM	SiCl4 pre valve closed
11/21/2012	11:23:51 AM	SiCl4 post valve closed
11/21/2012	11:23:51 AM	Bypass valve closed
11/21/2012	11:23:51 AM	Bubbler valve closed
11/21/2012	11:23:51 AM	Main Vac valve opened
11/21/2012	11:23:51 AM	Helium MFC set to  0.000000
11/21/2012	11:23:51 AM	H2 MFC set to  0.000000
11/21/2012	11:23:51 AM	BCl3 MFC set to  0.000000
11/21/2012	11:23:51 AM	PH3 MFC set to  0.000000
11/21/2012	11:23:51 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:23:51 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:23:51 AM	Tube furnace set to 0
11/21/2012	11:23:52 AM	Run finished at 11:23 AM
11/21/2012	11:23:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2012	11:38:58 AM	Recipe started at 11:38 AM
11/21/2012	11:38:58 AM	Helium valve closed
11/21/2012	11:38:58 AM	H2 valve closed
11/21/2012	11:38:58 AM	BCl3 valve closed
11/21/2012	11:38:58 AM	PH3 valve closed
11/21/2012	11:38:58 AM	SiCl4 pre valve closed
11/21/2012	11:38:58 AM	SiCl4 post valve closed
11/21/2012	11:38:58 AM	Bypass valve closed
11/21/2012	11:38:58 AM	Bubbler valve closed
11/21/2012	11:38:58 AM	Main Vac valve opened
11/21/2012	11:38:58 AM	Helium MFC set to  0.000000
11/21/2012	11:38:58 AM	H2 MFC set to  0.000000
11/21/2012	11:38:58 AM	BCl3 MFC set to  0.000000
11/21/2012	11:38:58 AM	PH3 MFC set to  0.000000
11/21/2012	11:38:58 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:38:58 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:38:59 AM	Tube furnace set to 150
11/21/2012	11:39:29 AM	H2 valve closed
11/21/2012	11:39:29 AM	BCl3 valve closed
11/21/2012	11:39:29 AM	PH3 valve closed
11/21/2012	11:39:29 AM	SiCl4 pre valve closed
11/21/2012	11:39:29 AM	SiCl4 post valve closed
11/21/2012	11:39:29 AM	Bypass valve closed
11/21/2012	11:39:29 AM	Bubbler valve closed
11/21/2012	11:39:29 AM	Helium valve opened
11/21/2012	11:39:29 AM	Main Vac valve opened
11/21/2012	11:39:29 AM	Helium MFC set to  20.000000
11/21/2012	11:39:29 AM	H2 MFC set to  0.000000
11/21/2012	11:39:29 AM	BCl3 MFC set to  0.000000
11/21/2012	11:39:29 AM	PH3 MFC set to  0.000000
11/21/2012	11:39:29 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:39:29 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:39:29 AM	Tube furnace set to 150
11/21/2012	11:39:59 AM	Helium valve closed
11/21/2012	11:39:59 AM	H2 valve closed
11/21/2012	11:39:59 AM	BCl3 valve closed
11/21/2012	11:39:59 AM	PH3 valve closed
11/21/2012	11:39:59 AM	SiCl4 pre valve closed
11/21/2012	11:39:59 AM	SiCl4 post valve closed
11/21/2012	11:39:59 AM	Bypass valve closed
11/21/2012	11:39:59 AM	Bubbler valve closed
11/21/2012	11:39:59 AM	Main Vac valve opened
11/21/2012	11:39:59 AM	Helium MFC set to  0.000000
11/21/2012	11:39:59 AM	H2 MFC set to  0.000000
11/21/2012	11:39:59 AM	BCl3 MFC set to  0.000000
11/21/2012	11:39:59 AM	PH3 MFC set to  0.000000
11/21/2012	11:39:59 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:39:59 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:39:59 AM	Tube furnace set to 150
11/21/2012	11:40:29 AM	H2 valve closed
11/21/2012	11:40:29 AM	BCl3 valve closed
11/21/2012	11:40:29 AM	PH3 valve closed
11/21/2012	11:40:29 AM	SiCl4 pre valve closed
11/21/2012	11:40:29 AM	SiCl4 post valve closed
11/21/2012	11:40:29 AM	Bypass valve closed
11/21/2012	11:40:29 AM	Bubbler valve closed
11/21/2012	11:40:29 AM	Helium valve opened
11/21/2012	11:40:29 AM	Main Vac valve opened
11/21/2012	11:40:29 AM	Helium MFC set to  20.000000
11/21/2012	11:40:29 AM	H2 MFC set to  0.000000
11/21/2012	11:40:29 AM	BCl3 MFC set to  0.000000
11/21/2012	11:40:29 AM	PH3 MFC set to  0.000000
11/21/2012	11:40:29 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:40:29 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:40:29 AM	Tube furnace set to 150
11/21/2012	11:40:59 AM	Helium valve closed
11/21/2012	11:40:59 AM	H2 valve closed
11/21/2012	11:40:59 AM	BCl3 valve closed
11/21/2012	11:40:59 AM	PH3 valve closed
11/21/2012	11:40:59 AM	SiCl4 pre valve closed
11/21/2012	11:40:59 AM	SiCl4 post valve closed
11/21/2012	11:40:59 AM	Bypass valve closed
11/21/2012	11:40:59 AM	Bubbler valve closed
11/21/2012	11:40:59 AM	Main Vac valve opened
11/21/2012	11:40:59 AM	Helium MFC set to  0.000000
11/21/2012	11:40:59 AM	H2 MFC set to  0.000000
11/21/2012	11:40:59 AM	BCl3 MFC set to  0.000000
11/21/2012	11:40:59 AM	PH3 MFC set to  0.000000
11/21/2012	11:40:59 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:40:59 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:41:00 AM	Tube furnace set to 150
11/21/2012	11:41:30 AM	H2 valve closed
11/21/2012	11:41:30 AM	BCl3 valve closed
11/21/2012	11:41:30 AM	PH3 valve closed
11/21/2012	11:41:30 AM	SiCl4 pre valve closed
11/21/2012	11:41:30 AM	SiCl4 post valve closed
11/21/2012	11:41:30 AM	Bypass valve closed
11/21/2012	11:41:30 AM	Bubbler valve closed
11/21/2012	11:41:30 AM	Helium valve opened
11/21/2012	11:41:30 AM	Main Vac valve opened
11/21/2012	11:41:30 AM	Helium MFC set to  20.000000
11/21/2012	11:41:30 AM	H2 MFC set to  0.000000
11/21/2012	11:41:30 AM	BCl3 MFC set to  0.000000
11/21/2012	11:41:30 AM	PH3 MFC set to  0.000000
11/21/2012	11:41:30 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:41:30 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:41:30 AM	Tube furnace set to 150
11/21/2012	11:42:00 AM	Helium valve closed
11/21/2012	11:42:00 AM	H2 valve closed
11/21/2012	11:42:00 AM	BCl3 valve closed
11/21/2012	11:42:00 AM	PH3 valve closed
11/21/2012	11:42:00 AM	SiCl4 pre valve closed
11/21/2012	11:42:00 AM	SiCl4 post valve closed
11/21/2012	11:42:00 AM	Bypass valve closed
11/21/2012	11:42:00 AM	Bubbler valve closed
11/21/2012	11:42:00 AM	Main Vac valve opened
11/21/2012	11:42:00 AM	Helium MFC set to  0.000000
11/21/2012	11:42:00 AM	H2 MFC set to  0.000000
11/21/2012	11:42:00 AM	BCl3 MFC set to  0.000000
11/21/2012	11:42:00 AM	PH3 MFC set to  0.000000
11/21/2012	11:42:00 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:42:00 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:42:00 AM	Tube furnace set to 150
11/21/2012	11:42:30 AM	H2 valve closed
11/21/2012	11:42:30 AM	BCl3 valve closed
11/21/2012	11:42:30 AM	PH3 valve closed
11/21/2012	11:42:30 AM	SiCl4 pre valve closed
11/21/2012	11:42:30 AM	SiCl4 post valve closed
11/21/2012	11:42:30 AM	Bypass valve closed
11/21/2012	11:42:30 AM	Bubbler valve closed
11/21/2012	11:42:30 AM	Helium valve opened
11/21/2012	11:42:30 AM	Main Vac valve opened
11/21/2012	11:42:30 AM	Helium MFC set to  20.000000
11/21/2012	11:42:30 AM	H2 MFC set to  0.000000
11/21/2012	11:42:30 AM	BCl3 MFC set to  0.000000
11/21/2012	11:42:30 AM	PH3 MFC set to  0.000000
11/21/2012	11:42:30 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:42:30 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:42:30 AM	Tube furnace set to 150
11/21/2012	11:43:00 AM	Helium valve closed
11/21/2012	11:43:00 AM	H2 valve closed
11/21/2012	11:43:00 AM	BCl3 valve closed
11/21/2012	11:43:00 AM	PH3 valve closed
11/21/2012	11:43:00 AM	SiCl4 pre valve closed
11/21/2012	11:43:00 AM	SiCl4 post valve closed
11/21/2012	11:43:00 AM	Bypass valve closed
11/21/2012	11:43:00 AM	Bubbler valve closed
11/21/2012	11:43:00 AM	Main Vac valve opened
11/21/2012	11:43:00 AM	Helium MFC set to  0.000000
11/21/2012	11:43:00 AM	H2 MFC set to  0.000000
11/21/2012	11:43:00 AM	BCl3 MFC set to  0.000000
11/21/2012	11:43:00 AM	PH3 MFC set to  0.000000
11/21/2012	11:43:00 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:43:00 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:43:00 AM	Tube furnace set to 150
11/21/2012	11:43:31 AM	H2 valve closed
11/21/2012	11:43:31 AM	BCl3 valve closed
11/21/2012	11:43:31 AM	PH3 valve closed
11/21/2012	11:43:31 AM	SiCl4 pre valve closed
11/21/2012	11:43:31 AM	SiCl4 post valve closed
11/21/2012	11:43:31 AM	Bypass valve closed
11/21/2012	11:43:31 AM	Bubbler valve closed
11/21/2012	11:43:31 AM	Helium valve opened
11/21/2012	11:43:31 AM	Main Vac valve opened
11/21/2012	11:43:31 AM	Helium MFC set to  20.000000
11/21/2012	11:43:31 AM	H2 MFC set to  0.000000
11/21/2012	11:43:31 AM	BCl3 MFC set to  0.000000
11/21/2012	11:43:31 AM	PH3 MFC set to  0.000000
11/21/2012	11:43:31 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:43:31 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:43:31 AM	Tube furnace set to 150
11/21/2012	11:44:01 AM	Helium valve closed
11/21/2012	11:44:01 AM	H2 valve closed
11/21/2012	11:44:01 AM	BCl3 valve closed
11/21/2012	11:44:01 AM	PH3 valve closed
11/21/2012	11:44:01 AM	SiCl4 pre valve closed
11/21/2012	11:44:01 AM	SiCl4 post valve closed
11/21/2012	11:44:01 AM	Bypass valve closed
11/21/2012	11:44:01 AM	Bubbler valve closed
11/21/2012	11:44:01 AM	Main Vac valve opened
11/21/2012	11:44:01 AM	Helium MFC set to  0.000000
11/21/2012	11:44:01 AM	H2 MFC set to  0.000000
11/21/2012	11:44:01 AM	BCl3 MFC set to  0.000000
11/21/2012	11:44:01 AM	PH3 MFC set to  0.000000
11/21/2012	11:44:01 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:44:01 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:44:01 AM	Tube furnace set to 150
11/21/2012	11:44:31 AM	H2 valve closed
11/21/2012	11:44:31 AM	BCl3 valve closed
11/21/2012	11:44:31 AM	PH3 valve closed
11/21/2012	11:44:31 AM	SiCl4 pre valve closed
11/21/2012	11:44:31 AM	SiCl4 post valve closed
11/21/2012	11:44:31 AM	Bypass valve closed
11/21/2012	11:44:31 AM	Bubbler valve closed
11/21/2012	11:44:31 AM	Helium valve opened
11/21/2012	11:44:31 AM	Main Vac valve opened
11/21/2012	11:44:31 AM	Helium MFC set to  20.000000
11/21/2012	11:44:31 AM	H2 MFC set to  0.000000
11/21/2012	11:44:31 AM	BCl3 MFC set to  0.000000
11/21/2012	11:44:31 AM	PH3 MFC set to  0.000000
11/21/2012	11:44:31 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:44:31 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:44:31 AM	Tube furnace set to 150
11/21/2012	11:45:01 AM	Helium valve closed
11/21/2012	11:45:01 AM	H2 valve closed
11/21/2012	11:45:01 AM	BCl3 valve closed
11/21/2012	11:45:01 AM	PH3 valve closed
11/21/2012	11:45:01 AM	SiCl4 pre valve closed
11/21/2012	11:45:01 AM	SiCl4 post valve closed
11/21/2012	11:45:01 AM	Bypass valve closed
11/21/2012	11:45:01 AM	Bubbler valve closed
11/21/2012	11:45:01 AM	Main Vac valve opened
11/21/2012	11:45:01 AM	Helium MFC set to  0.000000
11/21/2012	11:45:01 AM	H2 MFC set to  0.000000
11/21/2012	11:45:01 AM	BCl3 MFC set to  0.000000
11/21/2012	11:45:01 AM	PH3 MFC set to  0.000000
11/21/2012	11:45:01 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:45:01 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:45:01 AM	Tube furnace set to 150
11/21/2012	11:45:31 AM	H2 valve closed
11/21/2012	11:45:31 AM	BCl3 valve closed
11/21/2012	11:45:32 AM	PH3 valve closed
11/21/2012	11:45:32 AM	SiCl4 pre valve closed
11/21/2012	11:45:32 AM	SiCl4 post valve closed
11/21/2012	11:45:32 AM	Bypass valve closed
11/21/2012	11:45:32 AM	Bubbler valve closed
11/21/2012	11:45:32 AM	Helium valve opened
11/21/2012	11:45:32 AM	Main Vac valve opened
11/21/2012	11:45:32 AM	Helium MFC set to  20.000000
11/21/2012	11:45:32 AM	H2 MFC set to  0.000000
11/21/2012	11:45:32 AM	BCl3 MFC set to  0.000000
11/21/2012	11:45:32 AM	PH3 MFC set to  0.000000
11/21/2012	11:45:32 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:45:32 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:45:32 AM	Tube furnace set to 150
11/21/2012	11:46:02 AM	Helium valve closed
11/21/2012	11:46:02 AM	H2 valve closed
11/21/2012	11:46:02 AM	BCl3 valve closed
11/21/2012	11:46:02 AM	PH3 valve closed
11/21/2012	11:46:02 AM	SiCl4 pre valve closed
11/21/2012	11:46:02 AM	SiCl4 post valve closed
11/21/2012	11:46:02 AM	Bypass valve closed
11/21/2012	11:46:02 AM	Bubbler valve closed
11/21/2012	11:46:02 AM	Main Vac valve opened
11/21/2012	11:46:02 AM	Helium MFC set to  0.000000
11/21/2012	11:46:02 AM	H2 MFC set to  0.000000
11/21/2012	11:46:02 AM	BCl3 MFC set to  0.000000
11/21/2012	11:46:02 AM	PH3 MFC set to  0.000000
11/21/2012	11:46:02 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:46:02 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:46:02 AM	Tube furnace set to 150
11/21/2012	11:46:32 AM	H2 valve closed
11/21/2012	11:46:32 AM	BCl3 valve closed
11/21/2012	11:46:32 AM	PH3 valve closed
11/21/2012	11:46:32 AM	SiCl4 pre valve closed
11/21/2012	11:46:32 AM	SiCl4 post valve closed
11/21/2012	11:46:32 AM	Bypass valve closed
11/21/2012	11:46:32 AM	Bubbler valve closed
11/21/2012	11:46:32 AM	Helium valve opened
11/21/2012	11:46:32 AM	Main Vac valve opened
11/21/2012	11:46:32 AM	Helium MFC set to  20.000000
11/21/2012	11:46:32 AM	H2 MFC set to  0.000000
11/21/2012	11:46:32 AM	BCl3 MFC set to  0.000000
11/21/2012	11:46:32 AM	PH3 MFC set to  0.000000
11/21/2012	11:46:32 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:46:32 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:46:32 AM	Tube furnace set to 150
11/21/2012	11:47:02 AM	Helium valve closed
11/21/2012	11:47:02 AM	H2 valve closed
11/21/2012	11:47:02 AM	BCl3 valve closed
11/21/2012	11:47:02 AM	PH3 valve closed
11/21/2012	11:47:02 AM	SiCl4 pre valve closed
11/21/2012	11:47:02 AM	SiCl4 post valve closed
11/21/2012	11:47:02 AM	Bypass valve closed
11/21/2012	11:47:02 AM	Bubbler valve closed
11/21/2012	11:47:02 AM	Main Vac valve opened
11/21/2012	11:47:02 AM	Helium MFC set to  0.000000
11/21/2012	11:47:02 AM	H2 MFC set to  0.000000
11/21/2012	11:47:02 AM	BCl3 MFC set to  0.000000
11/21/2012	11:47:02 AM	PH3 MFC set to  0.000000
11/21/2012	11:47:02 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:47:02 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:47:02 AM	Tube furnace set to 150
11/21/2012	11:47:33 AM	H2 valve closed
11/21/2012	11:47:33 AM	BCl3 valve closed
11/21/2012	11:47:33 AM	PH3 valve closed
11/21/2012	11:47:33 AM	SiCl4 pre valve closed
11/21/2012	11:47:33 AM	SiCl4 post valve closed
11/21/2012	11:47:33 AM	Bypass valve closed
11/21/2012	11:47:33 AM	Bubbler valve closed
11/21/2012	11:47:33 AM	Helium valve opened
11/21/2012	11:47:33 AM	Main Vac valve opened
11/21/2012	11:47:33 AM	Helium MFC set to  20.000000
11/21/2012	11:47:33 AM	H2 MFC set to  0.000000
11/21/2012	11:47:33 AM	BCl3 MFC set to  0.000000
11/21/2012	11:47:33 AM	PH3 MFC set to  0.000000
11/21/2012	11:47:33 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:47:33 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:47:33 AM	Tube furnace set to 150
11/21/2012	11:48:03 AM	Helium valve closed
11/21/2012	11:48:03 AM	H2 valve closed
11/21/2012	11:48:03 AM	BCl3 valve closed
11/21/2012	11:48:03 AM	PH3 valve closed
11/21/2012	11:48:03 AM	SiCl4 pre valve closed
11/21/2012	11:48:03 AM	SiCl4 post valve closed
11/21/2012	11:48:03 AM	Bypass valve closed
11/21/2012	11:48:03 AM	Bubbler valve closed
11/21/2012	11:48:03 AM	Main Vac valve opened
11/21/2012	11:48:03 AM	Helium MFC set to  0.000000
11/21/2012	11:48:03 AM	H2 MFC set to  0.000000
11/21/2012	11:48:03 AM	BCl3 MFC set to  0.000000
11/21/2012	11:48:03 AM	PH3 MFC set to  0.000000
11/21/2012	11:48:03 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:48:03 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:48:03 AM	Tube furnace set to 150
11/21/2012	11:48:33 AM	H2 valve closed
11/21/2012	11:48:33 AM	BCl3 valve closed
11/21/2012	11:48:33 AM	PH3 valve closed
11/21/2012	11:48:33 AM	SiCl4 pre valve closed
11/21/2012	11:48:33 AM	SiCl4 post valve closed
11/21/2012	11:48:33 AM	Bypass valve closed
11/21/2012	11:48:33 AM	Bubbler valve closed
11/21/2012	11:48:33 AM	Helium valve opened
11/21/2012	11:48:33 AM	Main Vac valve opened
11/21/2012	11:48:33 AM	Helium MFC set to  20.000000
11/21/2012	11:48:33 AM	H2 MFC set to  0.000000
11/21/2012	11:48:33 AM	BCl3 MFC set to  0.000000
11/21/2012	11:48:33 AM	PH3 MFC set to  0.000000
11/21/2012	11:48:33 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:48:33 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:48:33 AM	Tube furnace set to 150
11/21/2012	11:49:03 AM	Helium valve closed
11/21/2012	11:49:03 AM	H2 valve closed
11/21/2012	11:49:03 AM	BCl3 valve closed
11/21/2012	11:49:03 AM	PH3 valve closed
11/21/2012	11:49:03 AM	SiCl4 pre valve closed
11/21/2012	11:49:03 AM	SiCl4 post valve closed
11/21/2012	11:49:03 AM	Bypass valve closed
11/21/2012	11:49:03 AM	Bubbler valve closed
11/21/2012	11:49:03 AM	Main Vac valve opened
11/21/2012	11:49:03 AM	Helium MFC set to  0.000000
11/21/2012	11:49:03 AM	H2 MFC set to  0.000000
11/21/2012	11:49:03 AM	BCl3 MFC set to  0.000000
11/21/2012	11:49:03 AM	PH3 MFC set to  0.000000
11/21/2012	11:49:03 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:49:03 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:49:03 AM	Tube furnace set to 150
11/21/2012	11:49:04 AM	Run finished at 11:49 AM
11/21/2012	11:53:09 AM	Main Vac valve closed
11/21/2012	11:53:16 AM	Main Vac valve opened
11/21/2012	11:53:26 AM	Recipe started at 11:53 AM
11/21/2012	11:53:26 AM	Helium valve closed
11/21/2012	11:53:26 AM	H2 valve closed
11/21/2012	11:53:26 AM	BCl3 valve closed
11/21/2012	11:53:26 AM	PH3 valve closed
11/21/2012	11:53:26 AM	SiCl4 pre valve closed
11/21/2012	11:53:26 AM	SiCl4 post valve closed
11/21/2012	11:53:26 AM	Bypass valve closed
11/21/2012	11:53:26 AM	Bubbler valve closed
11/21/2012	11:53:26 AM	Main Vac valve opened
11/21/2012	11:53:26 AM	Helium MFC set to  0.000000
11/21/2012	11:53:26 AM	H2 MFC set to  0.000000
11/21/2012	11:53:26 AM	BCl3 MFC set to  0.000000
11/21/2012	11:53:26 AM	PH3 MFC set to  0.000000
11/21/2012	11:53:26 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:53:26 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:53:26 AM	Tube furnace set to 150
11/21/2012	11:53:56 AM	H2 valve closed
11/21/2012	11:53:56 AM	BCl3 valve closed
11/21/2012	11:53:56 AM	PH3 valve closed
11/21/2012	11:53:56 AM	SiCl4 pre valve closed
11/21/2012	11:53:56 AM	SiCl4 post valve closed
11/21/2012	11:53:56 AM	Bypass valve closed
11/21/2012	11:53:56 AM	Bubbler valve closed
11/21/2012	11:53:56 AM	Helium valve opened
11/21/2012	11:53:56 AM	Main Vac valve opened
11/21/2012	11:53:56 AM	Helium MFC set to  20.000000
11/21/2012	11:53:56 AM	H2 MFC set to  0.000000
11/21/2012	11:53:56 AM	BCl3 MFC set to  0.000000
11/21/2012	11:53:56 AM	PH3 MFC set to  0.000000
11/21/2012	11:53:56 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:53:56 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:53:56 AM	Tube furnace set to 150
11/21/2012	11:54:26 AM	Helium valve closed
11/21/2012	11:54:26 AM	H2 valve closed
11/21/2012	11:54:26 AM	BCl3 valve closed
11/21/2012	11:54:26 AM	PH3 valve closed
11/21/2012	11:54:26 AM	SiCl4 pre valve closed
11/21/2012	11:54:26 AM	SiCl4 post valve closed
11/21/2012	11:54:26 AM	Bypass valve closed
11/21/2012	11:54:26 AM	Bubbler valve closed
11/21/2012	11:54:26 AM	Main Vac valve opened
11/21/2012	11:54:26 AM	Helium MFC set to  0.000000
11/21/2012	11:54:26 AM	H2 MFC set to  0.000000
11/21/2012	11:54:26 AM	BCl3 MFC set to  0.000000
11/21/2012	11:54:26 AM	PH3 MFC set to  0.000000
11/21/2012	11:54:26 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:54:26 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:54:26 AM	Tube furnace set to 150
11/21/2012	11:54:56 AM	H2 valve closed
11/21/2012	11:54:56 AM	BCl3 valve closed
11/21/2012	11:54:56 AM	PH3 valve closed
11/21/2012	11:54:56 AM	SiCl4 pre valve closed
11/21/2012	11:54:56 AM	SiCl4 post valve closed
11/21/2012	11:54:56 AM	Bypass valve closed
11/21/2012	11:54:56 AM	Bubbler valve closed
11/21/2012	11:54:56 AM	Helium valve opened
11/21/2012	11:54:56 AM	Main Vac valve opened
11/21/2012	11:54:56 AM	Helium MFC set to  20.000000
11/21/2012	11:54:56 AM	H2 MFC set to  0.000000
11/21/2012	11:54:56 AM	BCl3 MFC set to  0.000000
11/21/2012	11:54:56 AM	PH3 MFC set to  0.000000
11/21/2012	11:54:56 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:54:56 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:54:56 AM	Tube furnace set to 150
11/21/2012	11:55:27 AM	Helium valve closed
11/21/2012	11:55:27 AM	H2 valve closed
11/21/2012	11:55:27 AM	BCl3 valve closed
11/21/2012	11:55:27 AM	PH3 valve closed
11/21/2012	11:55:27 AM	SiCl4 pre valve closed
11/21/2012	11:55:27 AM	SiCl4 post valve closed
11/21/2012	11:55:27 AM	Bypass valve closed
11/21/2012	11:55:27 AM	Bubbler valve closed
11/21/2012	11:55:27 AM	Main Vac valve opened
11/21/2012	11:55:27 AM	Helium MFC set to  0.000000
11/21/2012	11:55:27 AM	H2 MFC set to  0.000000
11/21/2012	11:55:27 AM	BCl3 MFC set to  0.000000
11/21/2012	11:55:27 AM	PH3 MFC set to  0.000000
11/21/2012	11:55:27 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:55:27 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:55:27 AM	Tube furnace set to 150
11/21/2012	11:55:57 AM	H2 valve closed
11/21/2012	11:55:57 AM	BCl3 valve closed
11/21/2012	11:55:57 AM	PH3 valve closed
11/21/2012	11:55:57 AM	SiCl4 pre valve closed
11/21/2012	11:55:57 AM	SiCl4 post valve closed
11/21/2012	11:55:57 AM	Bypass valve closed
11/21/2012	11:55:57 AM	Bubbler valve closed
11/21/2012	11:55:57 AM	Helium valve opened
11/21/2012	11:55:57 AM	Main Vac valve opened
11/21/2012	11:55:57 AM	Helium MFC set to  20.000000
11/21/2012	11:55:57 AM	H2 MFC set to  0.000000
11/21/2012	11:55:57 AM	BCl3 MFC set to  0.000000
11/21/2012	11:55:57 AM	PH3 MFC set to  0.000000
11/21/2012	11:55:57 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:55:57 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:55:57 AM	Tube furnace set to 150
11/21/2012	11:56:27 AM	Helium valve closed
11/21/2012	11:56:27 AM	H2 valve closed
11/21/2012	11:56:27 AM	BCl3 valve closed
11/21/2012	11:56:27 AM	PH3 valve closed
11/21/2012	11:56:27 AM	SiCl4 pre valve closed
11/21/2012	11:56:27 AM	SiCl4 post valve closed
11/21/2012	11:56:27 AM	Bypass valve closed
11/21/2012	11:56:27 AM	Bubbler valve closed
11/21/2012	11:56:27 AM	Main Vac valve opened
11/21/2012	11:56:27 AM	Helium MFC set to  0.000000
11/21/2012	11:56:27 AM	H2 MFC set to  0.000000
11/21/2012	11:56:27 AM	BCl3 MFC set to  0.000000
11/21/2012	11:56:27 AM	PH3 MFC set to  0.000000
11/21/2012	11:56:27 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:56:27 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:56:27 AM	Tube furnace set to 150
11/21/2012	11:56:57 AM	H2 valve closed
11/21/2012	11:56:57 AM	BCl3 valve closed
11/21/2012	11:56:57 AM	PH3 valve closed
11/21/2012	11:56:57 AM	SiCl4 pre valve closed
11/21/2012	11:56:57 AM	SiCl4 post valve closed
11/21/2012	11:56:57 AM	Bypass valve closed
11/21/2012	11:56:57 AM	Bubbler valve closed
11/21/2012	11:56:57 AM	Helium valve opened
11/21/2012	11:56:57 AM	Main Vac valve opened
11/21/2012	11:56:57 AM	Helium MFC set to  20.000000
11/21/2012	11:56:57 AM	H2 MFC set to  0.000000
11/21/2012	11:56:57 AM	BCl3 MFC set to  0.000000
11/21/2012	11:56:57 AM	PH3 MFC set to  0.000000
11/21/2012	11:56:57 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:56:57 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:56:58 AM	Tube furnace set to 150
11/21/2012	11:57:28 AM	Helium valve closed
11/21/2012	11:57:28 AM	H2 valve closed
11/21/2012	11:57:28 AM	BCl3 valve closed
11/21/2012	11:57:28 AM	PH3 valve closed
11/21/2012	11:57:28 AM	SiCl4 pre valve closed
11/21/2012	11:57:28 AM	SiCl4 post valve closed
11/21/2012	11:57:28 AM	Bypass valve closed
11/21/2012	11:57:28 AM	Bubbler valve closed
11/21/2012	11:57:28 AM	Main Vac valve opened
11/21/2012	11:57:28 AM	Helium MFC set to  0.000000
11/21/2012	11:57:28 AM	H2 MFC set to  0.000000
11/21/2012	11:57:28 AM	BCl3 MFC set to  0.000000
11/21/2012	11:57:28 AM	PH3 MFC set to  0.000000
11/21/2012	11:57:28 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:57:28 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:57:28 AM	Tube furnace set to 150
11/21/2012	11:57:58 AM	H2 valve closed
11/21/2012	11:57:58 AM	BCl3 valve closed
11/21/2012	11:57:58 AM	PH3 valve closed
11/21/2012	11:57:58 AM	SiCl4 pre valve closed
11/21/2012	11:57:58 AM	SiCl4 post valve closed
11/21/2012	11:57:58 AM	Bypass valve closed
11/21/2012	11:57:58 AM	Bubbler valve closed
11/21/2012	11:57:58 AM	Helium valve opened
11/21/2012	11:57:58 AM	Main Vac valve opened
11/21/2012	11:57:58 AM	Helium MFC set to  20.000000
11/21/2012	11:57:58 AM	H2 MFC set to  0.000000
11/21/2012	11:57:58 AM	BCl3 MFC set to  0.000000
11/21/2012	11:57:58 AM	PH3 MFC set to  0.000000
11/21/2012	11:57:58 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:57:58 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:57:58 AM	Tube furnace set to 150
11/21/2012	11:58:28 AM	Helium valve closed
11/21/2012	11:58:28 AM	H2 valve closed
11/21/2012	11:58:28 AM	BCl3 valve closed
11/21/2012	11:58:28 AM	PH3 valve closed
11/21/2012	11:58:28 AM	SiCl4 pre valve closed
11/21/2012	11:58:28 AM	SiCl4 post valve closed
11/21/2012	11:58:28 AM	Bypass valve closed
11/21/2012	11:58:28 AM	Bubbler valve closed
11/21/2012	11:58:28 AM	Main Vac valve opened
11/21/2012	11:58:28 AM	Helium MFC set to  0.000000
11/21/2012	11:58:28 AM	H2 MFC set to  0.000000
11/21/2012	11:58:28 AM	BCl3 MFC set to  0.000000
11/21/2012	11:58:28 AM	PH3 MFC set to  0.000000
11/21/2012	11:58:28 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:58:28 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:58:28 AM	Tube furnace set to 150
11/21/2012	11:58:58 AM	H2 valve closed
11/21/2012	11:58:58 AM	BCl3 valve closed
11/21/2012	11:58:58 AM	PH3 valve closed
11/21/2012	11:58:58 AM	SiCl4 pre valve closed
11/21/2012	11:58:58 AM	SiCl4 post valve closed
11/21/2012	11:58:58 AM	Bypass valve closed
11/21/2012	11:58:58 AM	Bubbler valve closed
11/21/2012	11:58:58 AM	Helium valve opened
11/21/2012	11:58:58 AM	Main Vac valve opened
11/21/2012	11:58:58 AM	Helium MFC set to  20.000000
11/21/2012	11:58:58 AM	H2 MFC set to  0.000000
11/21/2012	11:58:58 AM	BCl3 MFC set to  0.000000
11/21/2012	11:58:58 AM	PH3 MFC set to  0.000000
11/21/2012	11:58:58 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:58:58 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:58:59 AM	Tube furnace set to 150
11/21/2012	11:59:29 AM	Helium valve closed
11/21/2012	11:59:29 AM	H2 valve closed
11/21/2012	11:59:29 AM	BCl3 valve closed
11/21/2012	11:59:29 AM	PH3 valve closed
11/21/2012	11:59:29 AM	SiCl4 pre valve closed
11/21/2012	11:59:29 AM	SiCl4 post valve closed
11/21/2012	11:59:29 AM	Bypass valve closed
11/21/2012	11:59:29 AM	Bubbler valve closed
11/21/2012	11:59:29 AM	Main Vac valve opened
11/21/2012	11:59:29 AM	Helium MFC set to  0.000000
11/21/2012	11:59:29 AM	H2 MFC set to  0.000000
11/21/2012	11:59:29 AM	BCl3 MFC set to  0.000000
11/21/2012	11:59:29 AM	PH3 MFC set to  0.000000
11/21/2012	11:59:29 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:59:29 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:59:29 AM	Tube furnace set to 150
11/21/2012	11:59:59 AM	H2 valve closed
11/21/2012	11:59:59 AM	BCl3 valve closed
11/21/2012	11:59:59 AM	PH3 valve closed
11/21/2012	11:59:59 AM	SiCl4 pre valve closed
11/21/2012	11:59:59 AM	SiCl4 post valve closed
11/21/2012	11:59:59 AM	Bypass valve closed
11/21/2012	11:59:59 AM	Bubbler valve closed
11/21/2012	11:59:59 AM	Helium valve opened
11/21/2012	11:59:59 AM	Main Vac valve opened
11/21/2012	11:59:59 AM	Helium MFC set to  20.000000
11/21/2012	11:59:59 AM	H2 MFC set to  0.000000
11/21/2012	11:59:59 AM	BCl3 MFC set to  0.000000
11/21/2012	11:59:59 AM	PH3 MFC set to  0.000000
11/21/2012	11:59:59 AM	SiCl4 MFC set to  0.000000
11/21/2012	11:59:59 AM	Bypass solenoid MFC set to  0.000000
11/21/2012	11:59:59 AM	Tube furnace set to 150
11/21/2012	12:00:29 PM	Helium valve closed
11/21/2012	12:00:29 PM	H2 valve closed
11/21/2012	12:00:29 PM	BCl3 valve closed
11/21/2012	12:00:29 PM	PH3 valve closed
11/21/2012	12:00:29 PM	SiCl4 pre valve closed
11/21/2012	12:00:29 PM	SiCl4 post valve closed
11/21/2012	12:00:29 PM	Bypass valve closed
11/21/2012	12:00:29 PM	Bubbler valve closed
11/21/2012	12:00:29 PM	Main Vac valve opened
11/21/2012	12:00:29 PM	Helium MFC set to  0.000000
11/21/2012	12:00:29 PM	H2 MFC set to  0.000000
11/21/2012	12:00:29 PM	BCl3 MFC set to  0.000000
11/21/2012	12:00:29 PM	PH3 MFC set to  0.000000
11/21/2012	12:00:29 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:00:29 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:00:29 PM	Tube furnace set to 150
11/21/2012	12:00:59 PM	H2 valve closed
11/21/2012	12:00:59 PM	BCl3 valve closed
11/21/2012	12:00:59 PM	PH3 valve closed
11/21/2012	12:00:59 PM	SiCl4 pre valve closed
11/21/2012	12:00:59 PM	SiCl4 post valve closed
11/21/2012	12:00:59 PM	Bypass valve closed
11/21/2012	12:00:59 PM	Bubbler valve closed
11/21/2012	12:00:59 PM	Helium valve opened
11/21/2012	12:00:59 PM	Main Vac valve opened
11/21/2012	12:00:59 PM	Helium MFC set to  20.000000
11/21/2012	12:00:59 PM	H2 MFC set to  0.000000
11/21/2012	12:00:59 PM	BCl3 MFC set to  0.000000
11/21/2012	12:00:59 PM	PH3 MFC set to  0.000000
11/21/2012	12:00:59 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:00:59 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:01:00 PM	Tube furnace set to 150
11/21/2012	12:01:30 PM	Helium valve closed
11/21/2012	12:01:30 PM	H2 valve closed
11/21/2012	12:01:30 PM	BCl3 valve closed
11/21/2012	12:01:30 PM	PH3 valve closed
11/21/2012	12:01:30 PM	SiCl4 pre valve closed
11/21/2012	12:01:30 PM	SiCl4 post valve closed
11/21/2012	12:01:30 PM	Bypass valve closed
11/21/2012	12:01:30 PM	Bubbler valve closed
11/21/2012	12:01:30 PM	Main Vac valve opened
11/21/2012	12:01:30 PM	Helium MFC set to  0.000000
11/21/2012	12:01:30 PM	H2 MFC set to  0.000000
11/21/2012	12:01:30 PM	BCl3 MFC set to  0.000000
11/21/2012	12:01:30 PM	PH3 MFC set to  0.000000
11/21/2012	12:01:30 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:01:30 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:01:30 PM	Tube furnace set to 150
11/21/2012	12:02:00 PM	H2 valve closed
11/21/2012	12:02:00 PM	BCl3 valve closed
11/21/2012	12:02:00 PM	PH3 valve closed
11/21/2012	12:02:00 PM	SiCl4 pre valve closed
11/21/2012	12:02:00 PM	SiCl4 post valve closed
11/21/2012	12:02:00 PM	Bypass valve closed
11/21/2012	12:02:00 PM	Bubbler valve closed
11/21/2012	12:02:00 PM	Helium valve opened
11/21/2012	12:02:00 PM	Main Vac valve opened
11/21/2012	12:02:00 PM	Helium MFC set to  20.000000
11/21/2012	12:02:00 PM	H2 MFC set to  0.000000
11/21/2012	12:02:00 PM	BCl3 MFC set to  0.000000
11/21/2012	12:02:00 PM	PH3 MFC set to  0.000000
11/21/2012	12:02:00 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:02:00 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:02:00 PM	Tube furnace set to 150
11/21/2012	12:02:30 PM	Helium valve closed
11/21/2012	12:02:30 PM	H2 valve closed
11/21/2012	12:02:30 PM	BCl3 valve closed
11/21/2012	12:02:30 PM	PH3 valve closed
11/21/2012	12:02:30 PM	SiCl4 pre valve closed
11/21/2012	12:02:30 PM	SiCl4 post valve closed
11/21/2012	12:02:30 PM	Bypass valve closed
11/21/2012	12:02:30 PM	Bubbler valve closed
11/21/2012	12:02:30 PM	Main Vac valve opened
11/21/2012	12:02:30 PM	Helium MFC set to  0.000000
11/21/2012	12:02:30 PM	H2 MFC set to  0.000000
11/21/2012	12:02:30 PM	BCl3 MFC set to  0.000000
11/21/2012	12:02:30 PM	PH3 MFC set to  0.000000
11/21/2012	12:02:30 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:02:30 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:02:30 PM	Tube furnace set to 150
11/21/2012	12:03:00 PM	H2 valve closed
11/21/2012	12:03:00 PM	BCl3 valve closed
11/21/2012	12:03:00 PM	PH3 valve closed
11/21/2012	12:03:00 PM	SiCl4 pre valve closed
11/21/2012	12:03:00 PM	SiCl4 post valve closed
11/21/2012	12:03:00 PM	Bypass valve closed
11/21/2012	12:03:00 PM	Bubbler valve closed
11/21/2012	12:03:00 PM	Helium valve opened
11/21/2012	12:03:00 PM	Main Vac valve opened
11/21/2012	12:03:00 PM	Helium MFC set to  20.000000
11/21/2012	12:03:00 PM	H2 MFC set to  0.000000
11/21/2012	12:03:00 PM	BCl3 MFC set to  0.000000
11/21/2012	12:03:00 PM	PH3 MFC set to  0.000000
11/21/2012	12:03:00 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:03:00 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:03:01 PM	Tube furnace set to 150
11/21/2012	12:03:31 PM	Helium valve closed
11/21/2012	12:03:31 PM	H2 valve closed
11/21/2012	12:03:31 PM	BCl3 valve closed
11/21/2012	12:03:31 PM	PH3 valve closed
11/21/2012	12:03:31 PM	SiCl4 pre valve closed
11/21/2012	12:03:31 PM	SiCl4 post valve closed
11/21/2012	12:03:31 PM	Bypass valve closed
11/21/2012	12:03:31 PM	Bubbler valve closed
11/21/2012	12:03:31 PM	Main Vac valve opened
11/21/2012	12:03:31 PM	Helium MFC set to  0.000000
11/21/2012	12:03:31 PM	H2 MFC set to  0.000000
11/21/2012	12:03:31 PM	BCl3 MFC set to  0.000000
11/21/2012	12:03:31 PM	PH3 MFC set to  0.000000
11/21/2012	12:03:31 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:03:31 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:03:31 PM	Tube furnace set to 150
11/21/2012	12:03:32 PM	Run finished at 12:03 PM
11/21/2012	12:05:19 PM	Main Vac valve closed
11/21/2012	12:05:26 PM	Main Vac valve opened
11/21/2012	12:05:48 PM	Recipe started at 12:05 PM
11/21/2012	12:05:48 PM	Helium valve closed
11/21/2012	12:05:48 PM	H2 valve closed
11/21/2012	12:05:48 PM	BCl3 valve closed
11/21/2012	12:05:48 PM	PH3 valve closed
11/21/2012	12:05:48 PM	SiCl4 pre valve closed
11/21/2012	12:05:48 PM	SiCl4 post valve closed
11/21/2012	12:05:48 PM	Bypass valve closed
11/21/2012	12:05:48 PM	Bubbler valve closed
11/21/2012	12:05:48 PM	Main Vac valve opened
11/21/2012	12:05:48 PM	Helium MFC set to  0.000000
11/21/2012	12:05:48 PM	H2 MFC set to  0.000000
11/21/2012	12:05:48 PM	BCl3 MFC set to  0.000000
11/21/2012	12:05:48 PM	PH3 MFC set to  0.000000
11/21/2012	12:05:48 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:05:48 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:05:48 PM	Tube furnace set to 150
11/21/2012	12:06:18 PM	H2 valve closed
11/21/2012	12:06:18 PM	BCl3 valve closed
11/21/2012	12:06:18 PM	PH3 valve closed
11/21/2012	12:06:18 PM	SiCl4 pre valve closed
11/21/2012	12:06:18 PM	SiCl4 post valve closed
11/21/2012	12:06:18 PM	Bypass valve closed
11/21/2012	12:06:18 PM	Bubbler valve closed
11/21/2012	12:06:18 PM	Helium valve opened
11/21/2012	12:06:18 PM	Main Vac valve opened
11/21/2012	12:06:18 PM	Helium MFC set to  20.000000
11/21/2012	12:06:18 PM	H2 MFC set to  0.000000
11/21/2012	12:06:18 PM	BCl3 MFC set to  0.000000
11/21/2012	12:06:18 PM	PH3 MFC set to  0.000000
11/21/2012	12:06:18 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:06:18 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:06:18 PM	Tube furnace set to 150
11/21/2012	12:06:48 PM	Helium valve closed
11/21/2012	12:06:48 PM	H2 valve closed
11/21/2012	12:06:48 PM	BCl3 valve closed
11/21/2012	12:06:48 PM	PH3 valve closed
11/21/2012	12:06:48 PM	SiCl4 pre valve closed
11/21/2012	12:06:48 PM	SiCl4 post valve closed
11/21/2012	12:06:48 PM	Bypass valve closed
11/21/2012	12:06:48 PM	Bubbler valve closed
11/21/2012	12:06:48 PM	Main Vac valve opened
11/21/2012	12:06:48 PM	Helium MFC set to  0.000000
11/21/2012	12:06:48 PM	H2 MFC set to  0.000000
11/21/2012	12:06:48 PM	BCl3 MFC set to  0.000000
11/21/2012	12:06:48 PM	PH3 MFC set to  0.000000
11/21/2012	12:06:48 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:06:48 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:06:48 PM	Tube furnace set to 150
11/21/2012	12:07:18 PM	H2 valve closed
11/21/2012	12:07:18 PM	BCl3 valve closed
11/21/2012	12:07:18 PM	PH3 valve closed
11/21/2012	12:07:18 PM	SiCl4 pre valve closed
11/21/2012	12:07:18 PM	SiCl4 post valve closed
11/21/2012	12:07:18 PM	Bypass valve closed
11/21/2012	12:07:18 PM	Bubbler valve closed
11/21/2012	12:07:18 PM	Helium valve opened
11/21/2012	12:07:18 PM	Main Vac valve opened
11/21/2012	12:07:18 PM	Helium MFC set to  20.000000
11/21/2012	12:07:18 PM	H2 MFC set to  0.000000
11/21/2012	12:07:18 PM	BCl3 MFC set to  0.000000
11/21/2012	12:07:18 PM	PH3 MFC set to  0.000000
11/21/2012	12:07:18 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:07:18 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:07:19 PM	Tube furnace set to 150
11/21/2012	12:07:49 PM	Helium valve closed
11/21/2012	12:07:49 PM	H2 valve closed
11/21/2012	12:07:49 PM	BCl3 valve closed
11/21/2012	12:07:49 PM	PH3 valve closed
11/21/2012	12:07:49 PM	SiCl4 pre valve closed
11/21/2012	12:07:49 PM	SiCl4 post valve closed
11/21/2012	12:07:49 PM	Bypass valve closed
11/21/2012	12:07:49 PM	Bubbler valve closed
11/21/2012	12:07:49 PM	Main Vac valve opened
11/21/2012	12:07:49 PM	Helium MFC set to  0.000000
11/21/2012	12:07:49 PM	H2 MFC set to  0.000000
11/21/2012	12:07:49 PM	BCl3 MFC set to  0.000000
11/21/2012	12:07:49 PM	PH3 MFC set to  0.000000
11/21/2012	12:07:49 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:07:49 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:07:49 PM	Tube furnace set to 150
11/21/2012	12:08:19 PM	H2 valve closed
11/21/2012	12:08:19 PM	BCl3 valve closed
11/21/2012	12:08:19 PM	PH3 valve closed
11/21/2012	12:08:19 PM	SiCl4 pre valve closed
11/21/2012	12:08:19 PM	SiCl4 post valve closed
11/21/2012	12:08:19 PM	Bypass valve closed
11/21/2012	12:08:19 PM	Bubbler valve closed
11/21/2012	12:08:19 PM	Helium valve opened
11/21/2012	12:08:19 PM	Main Vac valve opened
11/21/2012	12:08:19 PM	Helium MFC set to  20.000000
11/21/2012	12:08:19 PM	H2 MFC set to  0.000000
11/21/2012	12:08:19 PM	BCl3 MFC set to  0.000000
11/21/2012	12:08:19 PM	PH3 MFC set to  0.000000
11/21/2012	12:08:19 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:08:19 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:08:19 PM	Tube furnace set to 150
11/21/2012	12:08:49 PM	Helium valve closed
11/21/2012	12:08:49 PM	H2 valve closed
11/21/2012	12:08:49 PM	BCl3 valve closed
11/21/2012	12:08:49 PM	PH3 valve closed
11/21/2012	12:08:49 PM	SiCl4 pre valve closed
11/21/2012	12:08:49 PM	SiCl4 post valve closed
11/21/2012	12:08:49 PM	Bypass valve closed
11/21/2012	12:08:49 PM	Bubbler valve closed
11/21/2012	12:08:49 PM	Main Vac valve opened
11/21/2012	12:08:49 PM	Helium MFC set to  0.000000
11/21/2012	12:08:49 PM	H2 MFC set to  0.000000
11/21/2012	12:08:49 PM	BCl3 MFC set to  0.000000
11/21/2012	12:08:49 PM	PH3 MFC set to  0.000000
11/21/2012	12:08:49 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:08:49 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:08:49 PM	Tube furnace set to 150
11/21/2012	12:09:19 PM	H2 valve closed
11/21/2012	12:09:19 PM	BCl3 valve closed
11/21/2012	12:09:19 PM	PH3 valve closed
11/21/2012	12:09:19 PM	SiCl4 pre valve closed
11/21/2012	12:09:19 PM	SiCl4 post valve closed
11/21/2012	12:09:19 PM	Bypass valve closed
11/21/2012	12:09:19 PM	Bubbler valve closed
11/21/2012	12:09:19 PM	Helium valve opened
11/21/2012	12:09:19 PM	Main Vac valve opened
11/21/2012	12:09:19 PM	Helium MFC set to  20.000000
11/21/2012	12:09:19 PM	H2 MFC set to  0.000000
11/21/2012	12:09:19 PM	BCl3 MFC set to  0.000000
11/21/2012	12:09:19 PM	PH3 MFC set to  0.000000
11/21/2012	12:09:19 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:09:19 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:09:20 PM	Tube furnace set to 150
11/21/2012	12:09:50 PM	Helium valve closed
11/21/2012	12:09:50 PM	H2 valve closed
11/21/2012	12:09:50 PM	BCl3 valve closed
11/21/2012	12:09:50 PM	PH3 valve closed
11/21/2012	12:09:50 PM	SiCl4 pre valve closed
11/21/2012	12:09:50 PM	SiCl4 post valve closed
11/21/2012	12:09:50 PM	Bypass valve closed
11/21/2012	12:09:50 PM	Bubbler valve closed
11/21/2012	12:09:50 PM	Main Vac valve opened
11/21/2012	12:09:50 PM	Helium MFC set to  0.000000
11/21/2012	12:09:50 PM	H2 MFC set to  0.000000
11/21/2012	12:09:50 PM	BCl3 MFC set to  0.000000
11/21/2012	12:09:50 PM	PH3 MFC set to  0.000000
11/21/2012	12:09:50 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:09:50 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:09:50 PM	Tube furnace set to 150
11/21/2012	12:10:20 PM	H2 valve closed
11/21/2012	12:10:20 PM	BCl3 valve closed
11/21/2012	12:10:20 PM	PH3 valve closed
11/21/2012	12:10:20 PM	SiCl4 pre valve closed
11/21/2012	12:10:20 PM	SiCl4 post valve closed
11/21/2012	12:10:20 PM	Bypass valve closed
11/21/2012	12:10:20 PM	Bubbler valve closed
11/21/2012	12:10:20 PM	Helium valve opened
11/21/2012	12:10:20 PM	Main Vac valve opened
11/21/2012	12:10:20 PM	Helium MFC set to  20.000000
11/21/2012	12:10:20 PM	H2 MFC set to  0.000000
11/21/2012	12:10:20 PM	BCl3 MFC set to  0.000000
11/21/2012	12:10:20 PM	PH3 MFC set to  0.000000
11/21/2012	12:10:20 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:10:20 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:10:20 PM	Tube furnace set to 150
11/21/2012	12:10:50 PM	Helium valve closed
11/21/2012	12:10:50 PM	H2 valve closed
11/21/2012	12:10:50 PM	BCl3 valve closed
11/21/2012	12:10:50 PM	PH3 valve closed
11/21/2012	12:10:50 PM	SiCl4 pre valve closed
11/21/2012	12:10:50 PM	SiCl4 post valve closed
11/21/2012	12:10:50 PM	Bypass valve closed
11/21/2012	12:10:50 PM	Bubbler valve closed
11/21/2012	12:10:50 PM	Main Vac valve opened
11/21/2012	12:10:50 PM	Helium MFC set to  0.000000
11/21/2012	12:10:50 PM	H2 MFC set to  0.000000
11/21/2012	12:10:50 PM	BCl3 MFC set to  0.000000
11/21/2012	12:10:50 PM	PH3 MFC set to  0.000000
11/21/2012	12:10:50 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:10:50 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:10:50 PM	Tube furnace set to 150
11/21/2012	12:11:20 PM	H2 valve closed
11/21/2012	12:11:20 PM	BCl3 valve closed
11/21/2012	12:11:20 PM	PH3 valve closed
11/21/2012	12:11:20 PM	SiCl4 pre valve closed
11/21/2012	12:11:20 PM	SiCl4 post valve closed
11/21/2012	12:11:20 PM	Bypass valve closed
11/21/2012	12:11:20 PM	Bubbler valve closed
11/21/2012	12:11:20 PM	Helium valve opened
11/21/2012	12:11:20 PM	Main Vac valve opened
11/21/2012	12:11:20 PM	Helium MFC set to  20.000000
11/21/2012	12:11:20 PM	H2 MFC set to  0.000000
11/21/2012	12:11:20 PM	BCl3 MFC set to  0.000000
11/21/2012	12:11:21 PM	PH3 MFC set to  0.000000
11/21/2012	12:11:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:11:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:11:21 PM	Tube furnace set to 150
11/21/2012	12:11:51 PM	Helium valve closed
11/21/2012	12:11:51 PM	H2 valve closed
11/21/2012	12:11:51 PM	BCl3 valve closed
11/21/2012	12:11:51 PM	PH3 valve closed
11/21/2012	12:11:51 PM	SiCl4 pre valve closed
11/21/2012	12:11:51 PM	SiCl4 post valve closed
11/21/2012	12:11:51 PM	Bypass valve closed
11/21/2012	12:11:51 PM	Bubbler valve closed
11/21/2012	12:11:51 PM	Main Vac valve opened
11/21/2012	12:11:51 PM	Helium MFC set to  0.000000
11/21/2012	12:11:51 PM	H2 MFC set to  0.000000
11/21/2012	12:11:51 PM	BCl3 MFC set to  0.000000
11/21/2012	12:11:51 PM	PH3 MFC set to  0.000000
11/21/2012	12:11:51 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:11:51 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:11:51 PM	Tube furnace set to 150
11/21/2012	12:12:21 PM	H2 valve closed
11/21/2012	12:12:21 PM	BCl3 valve closed
11/21/2012	12:12:21 PM	PH3 valve closed
11/21/2012	12:12:21 PM	SiCl4 pre valve closed
11/21/2012	12:12:21 PM	SiCl4 post valve closed
11/21/2012	12:12:21 PM	Bypass valve closed
11/21/2012	12:12:21 PM	Bubbler valve closed
11/21/2012	12:12:21 PM	Helium valve opened
11/21/2012	12:12:21 PM	Main Vac valve opened
11/21/2012	12:12:21 PM	Helium MFC set to  20.000000
11/21/2012	12:12:21 PM	H2 MFC set to  0.000000
11/21/2012	12:12:21 PM	BCl3 MFC set to  0.000000
11/21/2012	12:12:21 PM	PH3 MFC set to  0.000000
11/21/2012	12:12:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:12:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:12:21 PM	Tube furnace set to 150
11/21/2012	12:12:51 PM	Helium valve closed
11/21/2012	12:12:51 PM	H2 valve closed
11/21/2012	12:12:51 PM	BCl3 valve closed
11/21/2012	12:12:51 PM	PH3 valve closed
11/21/2012	12:12:51 PM	SiCl4 pre valve closed
11/21/2012	12:12:51 PM	SiCl4 post valve closed
11/21/2012	12:12:51 PM	Bypass valve closed
11/21/2012	12:12:51 PM	Bubbler valve closed
11/21/2012	12:12:51 PM	Main Vac valve opened
11/21/2012	12:12:51 PM	Helium MFC set to  0.000000
11/21/2012	12:12:51 PM	H2 MFC set to  0.000000
11/21/2012	12:12:51 PM	BCl3 MFC set to  0.000000
11/21/2012	12:12:51 PM	PH3 MFC set to  0.000000
11/21/2012	12:12:51 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:12:51 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:12:51 PM	Tube furnace set to 150
11/21/2012	12:13:21 PM	H2 valve closed
11/21/2012	12:13:21 PM	BCl3 valve closed
11/21/2012	12:13:21 PM	PH3 valve closed
11/21/2012	12:13:21 PM	SiCl4 pre valve closed
11/21/2012	12:13:21 PM	SiCl4 post valve closed
11/21/2012	12:13:21 PM	Bypass valve closed
11/21/2012	12:13:21 PM	Bubbler valve closed
11/21/2012	12:13:22 PM	Helium valve opened
11/21/2012	12:13:22 PM	Main Vac valve opened
11/21/2012	12:13:22 PM	Helium MFC set to  20.000000
11/21/2012	12:13:22 PM	H2 MFC set to  0.000000
11/21/2012	12:13:22 PM	BCl3 MFC set to  0.000000
11/21/2012	12:13:22 PM	PH3 MFC set to  0.000000
11/21/2012	12:13:22 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:13:22 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:13:22 PM	Tube furnace set to 150
11/21/2012	12:13:52 PM	Helium valve closed
11/21/2012	12:13:52 PM	H2 valve closed
11/21/2012	12:13:52 PM	BCl3 valve closed
11/21/2012	12:13:52 PM	PH3 valve closed
11/21/2012	12:13:52 PM	SiCl4 pre valve closed
11/21/2012	12:13:52 PM	SiCl4 post valve closed
11/21/2012	12:13:52 PM	Bypass valve closed
11/21/2012	12:13:52 PM	Bubbler valve closed
11/21/2012	12:13:52 PM	Main Vac valve opened
11/21/2012	12:13:52 PM	Helium MFC set to  0.000000
11/21/2012	12:13:52 PM	H2 MFC set to  0.000000
11/21/2012	12:13:52 PM	BCl3 MFC set to  0.000000
11/21/2012	12:13:52 PM	PH3 MFC set to  0.000000
11/21/2012	12:13:52 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:13:52 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:13:52 PM	Tube furnace set to 150
11/21/2012	12:14:22 PM	H2 valve closed
11/21/2012	12:14:22 PM	BCl3 valve closed
11/21/2012	12:14:22 PM	PH3 valve closed
11/21/2012	12:14:22 PM	SiCl4 pre valve closed
11/21/2012	12:14:22 PM	SiCl4 post valve closed
11/21/2012	12:14:22 PM	Bypass valve closed
11/21/2012	12:14:22 PM	Bubbler valve closed
11/21/2012	12:14:22 PM	Helium valve opened
11/21/2012	12:14:22 PM	Main Vac valve opened
11/21/2012	12:14:22 PM	Helium MFC set to  20.000000
11/21/2012	12:14:22 PM	H2 MFC set to  0.000000
11/21/2012	12:14:22 PM	BCl3 MFC set to  0.000000
11/21/2012	12:14:22 PM	PH3 MFC set to  0.000000
11/21/2012	12:14:22 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:14:22 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:14:22 PM	Tube furnace set to 150
11/21/2012	12:14:52 PM	Helium valve closed
11/21/2012	12:14:52 PM	H2 valve closed
11/21/2012	12:14:52 PM	BCl3 valve closed
11/21/2012	12:14:52 PM	PH3 valve closed
11/21/2012	12:14:52 PM	SiCl4 pre valve closed
11/21/2012	12:14:52 PM	SiCl4 post valve closed
11/21/2012	12:14:52 PM	Bypass valve closed
11/21/2012	12:14:52 PM	Bubbler valve closed
11/21/2012	12:14:52 PM	Main Vac valve opened
11/21/2012	12:14:52 PM	Helium MFC set to  0.000000
11/21/2012	12:14:52 PM	H2 MFC set to  0.000000
11/21/2012	12:14:52 PM	BCl3 MFC set to  0.000000
11/21/2012	12:14:52 PM	PH3 MFC set to  0.000000
11/21/2012	12:14:52 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:14:52 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:14:52 PM	Tube furnace set to 150
11/21/2012	12:15:22 PM	H2 valve closed
11/21/2012	12:15:22 PM	BCl3 valve closed
11/21/2012	12:15:22 PM	PH3 valve closed
11/21/2012	12:15:22 PM	SiCl4 pre valve closed
11/21/2012	12:15:23 PM	SiCl4 post valve closed
11/21/2012	12:15:23 PM	Bypass valve closed
11/21/2012	12:15:23 PM	Bubbler valve closed
11/21/2012	12:15:23 PM	Helium valve opened
11/21/2012	12:15:23 PM	Main Vac valve opened
11/21/2012	12:15:23 PM	Helium MFC set to  20.000000
11/21/2012	12:15:23 PM	H2 MFC set to  0.000000
11/21/2012	12:15:23 PM	BCl3 MFC set to  0.000000
11/21/2012	12:15:23 PM	PH3 MFC set to  0.000000
11/21/2012	12:15:23 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:15:23 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:15:23 PM	Tube furnace set to 150
11/21/2012	12:15:53 PM	Helium valve closed
11/21/2012	12:15:53 PM	H2 valve closed
11/21/2012	12:15:53 PM	BCl3 valve closed
11/21/2012	12:15:53 PM	PH3 valve closed
11/21/2012	12:15:53 PM	SiCl4 pre valve closed
11/21/2012	12:15:53 PM	SiCl4 post valve closed
11/21/2012	12:15:53 PM	Bypass valve closed
11/21/2012	12:15:53 PM	Bubbler valve closed
11/21/2012	12:15:53 PM	Main Vac valve opened
11/21/2012	12:15:53 PM	Helium MFC set to  0.000000
11/21/2012	12:15:53 PM	H2 MFC set to  0.000000
11/21/2012	12:15:53 PM	BCl3 MFC set to  0.000000
11/21/2012	12:15:53 PM	PH3 MFC set to  0.000000
11/21/2012	12:15:53 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:15:53 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:15:53 PM	Tube furnace set to 150
11/21/2012	12:15:54 PM	Run finished at 12:15 PM
11/21/2012	12:49:41 PM	Main Vac valve closed
11/21/2012	12:49:52 PM	Main Vac valve opened
11/21/2012	12:50:04 PM	Recipe started at 12:49 PM
11/21/2012	12:50:04 PM	Helium valve closed
11/21/2012	12:50:04 PM	H2 valve closed
11/21/2012	12:50:04 PM	BCl3 valve closed
11/21/2012	12:50:04 PM	PH3 valve closed
11/21/2012	12:50:04 PM	SiCl4 pre valve closed
11/21/2012	12:50:04 PM	SiCl4 post valve closed
11/21/2012	12:50:04 PM	Bypass valve closed
11/21/2012	12:50:04 PM	Bubbler valve closed
11/21/2012	12:50:04 PM	Main Vac valve opened
11/21/2012	12:50:04 PM	Helium MFC set to  0.000000
11/21/2012	12:50:04 PM	H2 MFC set to  0.000000
11/21/2012	12:50:04 PM	BCl3 MFC set to  0.000000
11/21/2012	12:50:04 PM	PH3 MFC set to  0.000000
11/21/2012	12:50:04 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:50:04 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:50:04 PM	Tube furnace set to 150
11/21/2012	12:50:34 PM	H2 valve closed
11/21/2012	12:50:34 PM	BCl3 valve closed
11/21/2012	12:50:34 PM	PH3 valve closed
11/21/2012	12:50:34 PM	SiCl4 pre valve closed
11/21/2012	12:50:34 PM	SiCl4 post valve closed
11/21/2012	12:50:34 PM	Bypass valve closed
11/21/2012	12:50:34 PM	Bubbler valve closed
11/21/2012	12:50:34 PM	Helium valve opened
11/21/2012	12:50:34 PM	Main Vac valve opened
11/21/2012	12:50:34 PM	Helium MFC set to  20.000000
11/21/2012	12:50:34 PM	H2 MFC set to  0.000000
11/21/2012	12:50:34 PM	BCl3 MFC set to  0.000000
11/21/2012	12:50:34 PM	PH3 MFC set to  0.000000
11/21/2012	12:50:34 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:50:34 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:50:34 PM	Tube furnace set to 150
11/21/2012	12:51:04 PM	Helium valve closed
11/21/2012	12:51:04 PM	H2 valve closed
11/21/2012	12:51:04 PM	BCl3 valve closed
11/21/2012	12:51:04 PM	PH3 valve closed
11/21/2012	12:51:04 PM	SiCl4 pre valve closed
11/21/2012	12:51:04 PM	SiCl4 post valve closed
11/21/2012	12:51:04 PM	Bypass valve closed
11/21/2012	12:51:04 PM	Bubbler valve closed
11/21/2012	12:51:04 PM	Main Vac valve opened
11/21/2012	12:51:04 PM	Helium MFC set to  0.000000
11/21/2012	12:51:04 PM	H2 MFC set to  0.000000
11/21/2012	12:51:04 PM	BCl3 MFC set to  0.000000
11/21/2012	12:51:04 PM	PH3 MFC set to  0.000000
11/21/2012	12:51:04 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:51:04 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:51:05 PM	Tube furnace set to 150
11/21/2012	12:51:35 PM	H2 valve closed
11/21/2012	12:51:35 PM	BCl3 valve closed
11/21/2012	12:51:35 PM	PH3 valve closed
11/21/2012	12:51:35 PM	SiCl4 pre valve closed
11/21/2012	12:51:35 PM	SiCl4 post valve closed
11/21/2012	12:51:35 PM	Bypass valve closed
11/21/2012	12:51:35 PM	Bubbler valve closed
11/21/2012	12:51:35 PM	Helium valve opened
11/21/2012	12:51:35 PM	Main Vac valve opened
11/21/2012	12:51:35 PM	Helium MFC set to  20.000000
11/21/2012	12:51:35 PM	H2 MFC set to  0.000000
11/21/2012	12:51:35 PM	BCl3 MFC set to  0.000000
11/21/2012	12:51:35 PM	PH3 MFC set to  0.000000
11/21/2012	12:51:35 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:51:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:51:35 PM	Tube furnace set to 150
11/21/2012	12:52:05 PM	Helium valve closed
11/21/2012	12:52:05 PM	H2 valve closed
11/21/2012	12:52:05 PM	BCl3 valve closed
11/21/2012	12:52:05 PM	PH3 valve closed
11/21/2012	12:52:05 PM	SiCl4 pre valve closed
11/21/2012	12:52:05 PM	SiCl4 post valve closed
11/21/2012	12:52:05 PM	Bypass valve closed
11/21/2012	12:52:05 PM	Bubbler valve closed
11/21/2012	12:52:05 PM	Main Vac valve opened
11/21/2012	12:52:05 PM	Helium MFC set to  0.000000
11/21/2012	12:52:05 PM	H2 MFC set to  0.000000
11/21/2012	12:52:05 PM	BCl3 MFC set to  0.000000
11/21/2012	12:52:05 PM	PH3 MFC set to  0.000000
11/21/2012	12:52:05 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:52:05 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:52:05 PM	Tube furnace set to 150
11/21/2012	12:52:35 PM	H2 valve closed
11/21/2012	12:52:35 PM	BCl3 valve closed
11/21/2012	12:52:35 PM	PH3 valve closed
11/21/2012	12:52:35 PM	SiCl4 pre valve closed
11/21/2012	12:52:35 PM	SiCl4 post valve closed
11/21/2012	12:52:35 PM	Bypass valve closed
11/21/2012	12:52:35 PM	Bubbler valve closed
11/21/2012	12:52:35 PM	Helium valve opened
11/21/2012	12:52:35 PM	Main Vac valve opened
11/21/2012	12:52:35 PM	Helium MFC set to  20.000000
11/21/2012	12:52:35 PM	H2 MFC set to  0.000000
11/21/2012	12:52:35 PM	BCl3 MFC set to  0.000000
11/21/2012	12:52:35 PM	PH3 MFC set to  0.000000
11/21/2012	12:52:35 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:52:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:52:35 PM	Tube furnace set to 150
11/21/2012	12:53:05 PM	Helium valve closed
11/21/2012	12:53:05 PM	H2 valve closed
11/21/2012	12:53:05 PM	BCl3 valve closed
11/21/2012	12:53:05 PM	PH3 valve closed
11/21/2012	12:53:05 PM	SiCl4 pre valve closed
11/21/2012	12:53:05 PM	SiCl4 post valve closed
11/21/2012	12:53:05 PM	Bypass valve closed
11/21/2012	12:53:05 PM	Bubbler valve closed
11/21/2012	12:53:05 PM	Main Vac valve opened
11/21/2012	12:53:05 PM	Helium MFC set to  0.000000
11/21/2012	12:53:05 PM	H2 MFC set to  0.000000
11/21/2012	12:53:05 PM	BCl3 MFC set to  0.000000
11/21/2012	12:53:05 PM	PH3 MFC set to  0.000000
11/21/2012	12:53:05 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:53:05 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:53:06 PM	Tube furnace set to 150
11/21/2012	12:53:36 PM	H2 valve closed
11/21/2012	12:53:36 PM	BCl3 valve closed
11/21/2012	12:53:36 PM	PH3 valve closed
11/21/2012	12:53:36 PM	SiCl4 pre valve closed
11/21/2012	12:53:36 PM	SiCl4 post valve closed
11/21/2012	12:53:36 PM	Bypass valve closed
11/21/2012	12:53:36 PM	Bubbler valve closed
11/21/2012	12:53:36 PM	Helium valve opened
11/21/2012	12:53:36 PM	Main Vac valve opened
11/21/2012	12:53:36 PM	Helium MFC set to  20.000000
11/21/2012	12:53:36 PM	H2 MFC set to  0.000000
11/21/2012	12:53:36 PM	BCl3 MFC set to  0.000000
11/21/2012	12:53:36 PM	PH3 MFC set to  0.000000
11/21/2012	12:53:36 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:53:36 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:53:36 PM	Tube furnace set to 150
11/21/2012	12:54:06 PM	Helium valve closed
11/21/2012	12:54:06 PM	H2 valve closed
11/21/2012	12:54:06 PM	BCl3 valve closed
11/21/2012	12:54:06 PM	PH3 valve closed
11/21/2012	12:54:06 PM	SiCl4 pre valve closed
11/21/2012	12:54:06 PM	SiCl4 post valve closed
11/21/2012	12:54:06 PM	Bypass valve closed
11/21/2012	12:54:06 PM	Bubbler valve closed
11/21/2012	12:54:06 PM	Main Vac valve opened
11/21/2012	12:54:06 PM	Helium MFC set to  0.000000
11/21/2012	12:54:06 PM	H2 MFC set to  0.000000
11/21/2012	12:54:06 PM	BCl3 MFC set to  0.000000
11/21/2012	12:54:06 PM	PH3 MFC set to  0.000000
11/21/2012	12:54:06 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:54:06 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:54:06 PM	Tube furnace set to 150
11/21/2012	12:54:36 PM	H2 valve closed
11/21/2012	12:54:36 PM	BCl3 valve closed
11/21/2012	12:54:36 PM	PH3 valve closed
11/21/2012	12:54:36 PM	SiCl4 pre valve closed
11/21/2012	12:54:36 PM	SiCl4 post valve closed
11/21/2012	12:54:36 PM	Bypass valve closed
11/21/2012	12:54:36 PM	Bubbler valve closed
11/21/2012	12:54:36 PM	Helium valve opened
11/21/2012	12:54:36 PM	Main Vac valve opened
11/21/2012	12:54:36 PM	Helium MFC set to  20.000000
11/21/2012	12:54:36 PM	H2 MFC set to  0.000000
11/21/2012	12:54:36 PM	BCl3 MFC set to  0.000000
11/21/2012	12:54:36 PM	PH3 MFC set to  0.000000
11/21/2012	12:54:36 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:54:36 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:54:36 PM	Tube furnace set to 150
11/21/2012	12:55:06 PM	Helium valve closed
11/21/2012	12:55:06 PM	H2 valve closed
11/21/2012	12:55:06 PM	BCl3 valve closed
11/21/2012	12:55:06 PM	PH3 valve closed
11/21/2012	12:55:06 PM	SiCl4 pre valve closed
11/21/2012	12:55:06 PM	SiCl4 post valve closed
11/21/2012	12:55:06 PM	Bypass valve closed
11/21/2012	12:55:06 PM	Bubbler valve closed
11/21/2012	12:55:06 PM	Main Vac valve opened
11/21/2012	12:55:06 PM	Helium MFC set to  0.000000
11/21/2012	12:55:06 PM	H2 MFC set to  0.000000
11/21/2012	12:55:06 PM	BCl3 MFC set to  0.000000
11/21/2012	12:55:07 PM	PH3 MFC set to  0.000000
11/21/2012	12:55:07 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:55:07 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:55:07 PM	Tube furnace set to 150
11/21/2012	12:55:37 PM	H2 valve closed
11/21/2012	12:55:37 PM	BCl3 valve closed
11/21/2012	12:55:37 PM	PH3 valve closed
11/21/2012	12:55:37 PM	SiCl4 pre valve closed
11/21/2012	12:55:37 PM	SiCl4 post valve closed
11/21/2012	12:55:37 PM	Bypass valve closed
11/21/2012	12:55:37 PM	Bubbler valve closed
11/21/2012	12:55:37 PM	Helium valve opened
11/21/2012	12:55:37 PM	Main Vac valve opened
11/21/2012	12:55:37 PM	Helium MFC set to  20.000000
11/21/2012	12:55:37 PM	H2 MFC set to  0.000000
11/21/2012	12:55:37 PM	BCl3 MFC set to  0.000000
11/21/2012	12:55:37 PM	PH3 MFC set to  0.000000
11/21/2012	12:55:37 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:55:37 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:55:37 PM	Tube furnace set to 150
11/21/2012	12:56:07 PM	Helium valve closed
11/21/2012	12:56:07 PM	H2 valve closed
11/21/2012	12:56:07 PM	BCl3 valve closed
11/21/2012	12:56:07 PM	PH3 valve closed
11/21/2012	12:56:07 PM	SiCl4 pre valve closed
11/21/2012	12:56:07 PM	SiCl4 post valve closed
11/21/2012	12:56:07 PM	Bypass valve closed
11/21/2012	12:56:07 PM	Bubbler valve closed
11/21/2012	12:56:07 PM	Main Vac valve opened
11/21/2012	12:56:07 PM	Helium MFC set to  0.000000
11/21/2012	12:56:07 PM	H2 MFC set to  0.000000
11/21/2012	12:56:07 PM	BCl3 MFC set to  0.000000
11/21/2012	12:56:07 PM	PH3 MFC set to  0.000000
11/21/2012	12:56:07 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:56:07 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:56:07 PM	Tube furnace set to 150
11/21/2012	12:56:37 PM	H2 valve closed
11/21/2012	12:56:37 PM	BCl3 valve closed
11/21/2012	12:56:37 PM	PH3 valve closed
11/21/2012	12:56:37 PM	SiCl4 pre valve closed
11/21/2012	12:56:37 PM	SiCl4 post valve closed
11/21/2012	12:56:37 PM	Bypass valve closed
11/21/2012	12:56:37 PM	Bubbler valve closed
11/21/2012	12:56:37 PM	Helium valve opened
11/21/2012	12:56:37 PM	Main Vac valve opened
11/21/2012	12:56:37 PM	Helium MFC set to  20.000000
11/21/2012	12:56:37 PM	H2 MFC set to  0.000000
11/21/2012	12:56:37 PM	BCl3 MFC set to  0.000000
11/21/2012	12:56:37 PM	PH3 MFC set to  0.000000
11/21/2012	12:56:37 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:56:37 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:56:37 PM	Tube furnace set to 150
11/21/2012	12:57:07 PM	Helium valve closed
11/21/2012	12:57:07 PM	H2 valve closed
11/21/2012	12:57:07 PM	BCl3 valve closed
11/21/2012	12:57:07 PM	PH3 valve closed
11/21/2012	12:57:07 PM	SiCl4 pre valve closed
11/21/2012	12:57:07 PM	SiCl4 post valve closed
11/21/2012	12:57:07 PM	Bypass valve closed
11/21/2012	12:57:07 PM	Bubbler valve closed
11/21/2012	12:57:08 PM	Main Vac valve opened
11/21/2012	12:57:08 PM	Helium MFC set to  0.000000
11/21/2012	12:57:08 PM	H2 MFC set to  0.000000
11/21/2012	12:57:08 PM	BCl3 MFC set to  0.000000
11/21/2012	12:57:08 PM	PH3 MFC set to  0.000000
11/21/2012	12:57:08 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:57:08 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:57:08 PM	Tube furnace set to 150
11/21/2012	12:57:38 PM	H2 valve closed
11/21/2012	12:57:38 PM	BCl3 valve closed
11/21/2012	12:57:38 PM	PH3 valve closed
11/21/2012	12:57:38 PM	SiCl4 pre valve closed
11/21/2012	12:57:38 PM	SiCl4 post valve closed
11/21/2012	12:57:38 PM	Bypass valve closed
11/21/2012	12:57:38 PM	Bubbler valve closed
11/21/2012	12:57:38 PM	Helium valve opened
11/21/2012	12:57:38 PM	Main Vac valve opened
11/21/2012	12:57:38 PM	Helium MFC set to  20.000000
11/21/2012	12:57:38 PM	H2 MFC set to  0.000000
11/21/2012	12:57:38 PM	BCl3 MFC set to  0.000000
11/21/2012	12:57:38 PM	PH3 MFC set to  0.000000
11/21/2012	12:57:38 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:57:38 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:57:38 PM	Tube furnace set to 150
11/21/2012	12:58:08 PM	Helium valve closed
11/21/2012	12:58:08 PM	H2 valve closed
11/21/2012	12:58:08 PM	BCl3 valve closed
11/21/2012	12:58:08 PM	PH3 valve closed
11/21/2012	12:58:08 PM	SiCl4 pre valve closed
11/21/2012	12:58:08 PM	SiCl4 post valve closed
11/21/2012	12:58:08 PM	Bypass valve closed
11/21/2012	12:58:08 PM	Bubbler valve closed
11/21/2012	12:58:08 PM	Main Vac valve opened
11/21/2012	12:58:08 PM	Helium MFC set to  0.000000
11/21/2012	12:58:08 PM	H2 MFC set to  0.000000
11/21/2012	12:58:08 PM	BCl3 MFC set to  0.000000
11/21/2012	12:58:08 PM	PH3 MFC set to  0.000000
11/21/2012	12:58:08 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:58:08 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:58:08 PM	Tube furnace set to 150
11/21/2012	12:58:38 PM	H2 valve closed
11/21/2012	12:58:38 PM	BCl3 valve closed
11/21/2012	12:58:38 PM	PH3 valve closed
11/21/2012	12:58:38 PM	SiCl4 pre valve closed
11/21/2012	12:58:38 PM	SiCl4 post valve closed
11/21/2012	12:58:38 PM	Bypass valve closed
11/21/2012	12:58:38 PM	Bubbler valve closed
11/21/2012	12:58:38 PM	Helium valve opened
11/21/2012	12:58:38 PM	Main Vac valve opened
11/21/2012	12:58:38 PM	Helium MFC set to  20.000000
11/21/2012	12:58:38 PM	H2 MFC set to  0.000000
11/21/2012	12:58:38 PM	BCl3 MFC set to  0.000000
11/21/2012	12:58:38 PM	PH3 MFC set to  0.000000
11/21/2012	12:58:38 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:58:38 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:58:38 PM	Tube furnace set to 150
11/21/2012	12:59:08 PM	Helium valve closed
11/21/2012	12:59:08 PM	H2 valve closed
11/21/2012	12:59:08 PM	BCl3 valve closed
11/21/2012	12:59:08 PM	PH3 valve closed
11/21/2012	12:59:08 PM	SiCl4 pre valve closed
11/21/2012	12:59:08 PM	SiCl4 post valve closed
11/21/2012	12:59:09 PM	Bypass valve closed
11/21/2012	12:59:09 PM	Bubbler valve closed
11/21/2012	12:59:09 PM	Main Vac valve opened
11/21/2012	12:59:09 PM	Helium MFC set to  0.000000
11/21/2012	12:59:09 PM	H2 MFC set to  0.000000
11/21/2012	12:59:09 PM	BCl3 MFC set to  0.000000
11/21/2012	12:59:09 PM	PH3 MFC set to  0.000000
11/21/2012	12:59:09 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:59:09 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:59:09 PM	Tube furnace set to 150
11/21/2012	12:59:39 PM	H2 valve closed
11/21/2012	12:59:39 PM	BCl3 valve closed
11/21/2012	12:59:39 PM	PH3 valve closed
11/21/2012	12:59:39 PM	SiCl4 pre valve closed
11/21/2012	12:59:39 PM	SiCl4 post valve closed
11/21/2012	12:59:39 PM	Bypass valve closed
11/21/2012	12:59:39 PM	Bubbler valve closed
11/21/2012	12:59:39 PM	Helium valve opened
11/21/2012	12:59:39 PM	Main Vac valve opened
11/21/2012	12:59:39 PM	Helium MFC set to  20.000000
11/21/2012	12:59:39 PM	H2 MFC set to  0.000000
11/21/2012	12:59:39 PM	BCl3 MFC set to  0.000000
11/21/2012	12:59:39 PM	PH3 MFC set to  0.000000
11/21/2012	12:59:39 PM	SiCl4 MFC set to  0.000000
11/21/2012	12:59:39 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	12:59:39 PM	Tube furnace set to 150
11/21/2012	1:00:09 PM	Helium valve closed
11/21/2012	1:00:09 PM	H2 valve closed
11/21/2012	1:00:09 PM	BCl3 valve closed
11/21/2012	1:00:09 PM	PH3 valve closed
11/21/2012	1:00:09 PM	SiCl4 pre valve closed
11/21/2012	1:00:09 PM	SiCl4 post valve closed
11/21/2012	1:00:09 PM	Bypass valve closed
11/21/2012	1:00:09 PM	Bubbler valve closed
11/21/2012	1:00:09 PM	Main Vac valve opened
11/21/2012	1:00:09 PM	Helium MFC set to  0.000000
11/21/2012	1:00:09 PM	H2 MFC set to  0.000000
11/21/2012	1:00:09 PM	BCl3 MFC set to  0.000000
11/21/2012	1:00:09 PM	PH3 MFC set to  0.000000
11/21/2012	1:00:09 PM	SiCl4 MFC set to  0.000000
11/21/2012	1:00:09 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	1:00:09 PM	Tube furnace set to 150
11/21/2012	1:00:10 PM	Run finished at 1:00 PM
11/21/2012	1:07:06 PM	Main Vac valve closed
11/21/2012	1:07:16 PM	Main Vac valve opened
11/21/2012	1:08:03 PM	Recipe started at 1:08 PM
11/21/2012	1:08:03 PM	Helium valve closed
11/21/2012	1:08:03 PM	H2 valve closed
11/21/2012	1:08:03 PM	BCl3 valve closed
11/21/2012	1:08:03 PM	PH3 valve closed
11/21/2012	1:08:03 PM	SiCl4 pre valve closed
11/21/2012	1:08:03 PM	SiCl4 post valve closed
11/21/2012	1:08:03 PM	Main Vac valve closed
11/21/2012	1:08:03 PM	Bypass valve closed
11/21/2012	1:08:03 PM	Bubbler valve closed
11/21/2012	1:08:03 PM	Helium MFC set to  0.000000
11/21/2012	1:08:03 PM	H2 MFC set to  0.000000
11/21/2012	1:08:03 PM	BCl3 MFC set to  0.000000
11/21/2012	1:08:03 PM	PH3 MFC set to  0.000000
11/21/2012	1:08:03 PM	SiCl4 MFC set to  0.000000
11/21/2012	1:08:03 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	1:08:03 PM	Tube furnace set to 0
11/21/2012	1:08:06 PM	Helium valve closed
11/21/2012	1:08:06 PM	BCl3 valve closed
11/21/2012	1:08:06 PM	PH3 valve closed
11/21/2012	1:08:06 PM	SiCl4 pre valve closed
11/21/2012	1:08:06 PM	SiCl4 post valve closed
11/21/2012	1:08:06 PM	Main Vac valve closed
11/21/2012	1:08:06 PM	Bypass valve closed
11/21/2012	1:08:06 PM	Bubbler valve closed
11/21/2012	1:08:06 PM	H2 valve opened
11/21/2012	1:08:06 PM	Helium MFC set to  0.000000
11/21/2012	1:08:06 PM	H2 MFC set to  500.000000
11/21/2012	1:08:06 PM	BCl3 MFC set to  0.000000
11/21/2012	1:08:06 PM	PH3 MFC set to  0.000000
11/21/2012	1:08:07 PM	SiCl4 MFC set to  0.000000
11/21/2012	1:08:07 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	1:08:07 PM	Tube furnace set to 0
11/21/2012	1:09:19 PM	Helium valve closed
11/21/2012	1:09:19 PM	BCl3 valve closed
11/21/2012	1:09:19 PM	PH3 valve closed
11/21/2012	1:09:19 PM	SiCl4 pre valve closed
11/21/2012	1:09:19 PM	SiCl4 post valve closed
11/21/2012	1:09:19 PM	Main Vac valve closed
11/21/2012	1:09:19 PM	Bypass valve closed
11/21/2012	1:09:19 PM	H2 valve opened
11/21/2012	1:09:19 PM	Bubbler valve opened
11/21/2012	1:09:19 PM	Helium MFC set to  0.000000
11/21/2012	1:09:19 PM	H2 MFC set to  500.000000
11/21/2012	1:09:19 PM	BCl3 MFC set to  0.000000
11/21/2012	1:09:19 PM	PH3 MFC set to  0.000000
11/21/2012	1:09:19 PM	SiCl4 MFC set to  0.000000
11/21/2012	1:09:19 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	1:09:19 PM	Tube furnace set to 0
11/21/2012	1:09:20 PM	Helium valve closed
11/21/2012	1:09:20 PM	BCl3 valve closed
11/21/2012	1:09:20 PM	PH3 valve closed
11/21/2012	1:09:20 PM	SiCl4 pre valve closed
11/21/2012	1:09:20 PM	SiCl4 post valve closed
11/21/2012	1:09:20 PM	Main Vac valve closed
11/21/2012	1:09:20 PM	Bypass valve closed
11/21/2012	1:09:20 PM	H2 valve opened
11/21/2012	1:09:20 PM	Bubbler valve opened
11/21/2012	1:09:20 PM	Helium MFC set to  0.000000
11/21/2012	1:09:20 PM	H2 MFC set to  450.000000
11/21/2012	1:09:20 PM	BCl3 MFC set to  0.000000
11/21/2012	1:09:20 PM	PH3 MFC set to  0.000000
11/21/2012	1:09:20 PM	SiCl4 MFC set to  0.000000
11/21/2012	1:09:20 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	1:09:20 PM	Tube furnace set to 1000
11/21/2012	1:34:20 PM	Helium valve closed
11/21/2012	1:34:20 PM	PH3 valve closed
11/21/2012	1:34:20 PM	Main Vac valve closed
11/21/2012	1:34:20 PM	Bypass valve closed
11/21/2012	1:34:20 PM	H2 valve opened
11/21/2012	1:34:20 PM	BCl3 valve opened
11/21/2012	1:34:20 PM	SiCl4 pre valve opened
11/21/2012	1:34:20 PM	SiCl4 post valve opened
11/21/2012	1:34:20 PM	Bubbler valve opened
11/21/2012	1:34:20 PM	Helium MFC set to  0.000000
11/21/2012	1:34:20 PM	H2 MFC set to  450.000000
11/21/2012	1:34:20 PM	BCl3 MFC set to  1.500000
11/21/2012	1:34:20 PM	PH3 MFC set to  0.000000
11/21/2012	1:34:20 PM	SiCl4 MFC set to  50.000000
11/21/2012	1:34:20 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	1:34:21 PM	Tube furnace set to 1000
11/21/2012	1:42:21 PM	Helium valve closed
11/21/2012	1:42:21 PM	BCl3 valve closed
11/21/2012	1:42:21 PM	PH3 valve closed
11/21/2012	1:42:21 PM	SiCl4 pre valve closed
11/21/2012	1:42:21 PM	SiCl4 post valve closed
11/21/2012	1:42:21 PM	Main Vac valve closed
11/21/2012	1:42:21 PM	Bypass valve closed
11/21/2012	1:42:21 PM	H2 valve opened
11/21/2012	1:42:21 PM	Bubbler valve opened
11/21/2012	1:42:21 PM	Helium MFC set to  0.000000
11/21/2012	1:42:21 PM	H2 MFC set to  500.000000
11/21/2012	1:42:21 PM	BCl3 MFC set to  0.000000
11/21/2012	1:42:21 PM	PH3 MFC set to  0.000000
11/21/2012	1:42:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	1:42:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	1:42:21 PM	Tube furnace set to 750
11/21/2012	1:47:21 PM	H2 valve closed
11/21/2012	1:47:21 PM	BCl3 valve closed
11/21/2012	1:47:21 PM	PH3 valve closed
11/21/2012	1:47:21 PM	SiCl4 pre valve closed
11/21/2012	1:47:21 PM	SiCl4 post valve closed
11/21/2012	1:47:21 PM	Main Vac valve closed
11/21/2012	1:47:21 PM	Bypass valve closed
11/21/2012	1:47:21 PM	Helium valve opened
11/21/2012	1:47:21 PM	Bubbler valve opened
11/21/2012	1:47:21 PM	Helium MFC set to  500.000000
11/21/2012	1:47:21 PM	H2 MFC set to  0.000000
11/21/2012	1:47:21 PM	BCl3 MFC set to  0.000000
11/21/2012	1:47:21 PM	PH3 MFC set to  0.000000
11/21/2012	1:47:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	1:47:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	1:47:21 PM	Tube furnace set to 0
11/21/2012	2:04:11 PM	Helium valve closed
11/21/2012	2:04:11 PM	H2 valve closed
11/21/2012	2:04:11 PM	BCl3 valve closed
11/21/2012	2:04:11 PM	PH3 valve closed
11/21/2012	2:04:11 PM	SiCl4 pre valve closed
11/21/2012	2:04:11 PM	SiCl4 post valve closed
11/21/2012	2:04:11 PM	Main Vac valve closed
11/21/2012	2:04:11 PM	Bypass valve closed
11/21/2012	2:04:11 PM	Bubbler valve closed
11/21/2012	2:04:11 PM	Helium MFC set to  0.000000
11/21/2012	2:04:11 PM	H2 MFC set to  0.000000
11/21/2012	2:04:11 PM	BCl3 MFC set to  0.000000
11/21/2012	2:04:11 PM	PH3 MFC set to  0.000000
11/21/2012	2:04:11 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:04:11 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:04:11 PM	Tube furnace set to 0
11/21/2012	2:04:12 PM	Run finished at 2:04 PM
11/21/2012	2:05:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2012	2:05:15 PM	Recipe started at 2:05 PM
11/21/2012	2:05:15 PM	Helium valve closed
11/21/2012	2:05:15 PM	H2 valve closed
11/21/2012	2:05:15 PM	BCl3 valve closed
11/21/2012	2:05:15 PM	PH3 valve closed
11/21/2012	2:05:15 PM	SiCl4 pre valve closed
11/21/2012	2:05:15 PM	SiCl4 post valve closed
11/21/2012	2:05:15 PM	Main Vac valve closed
11/21/2012	2:05:15 PM	Bypass valve closed
11/21/2012	2:05:15 PM	Bubbler valve closed
11/21/2012	2:05:15 PM	Helium MFC set to  0.000000
11/21/2012	2:05:15 PM	H2 MFC set to  0.000000
11/21/2012	2:05:15 PM	BCl3 MFC set to  0.000000
11/21/2012	2:05:15 PM	PH3 MFC set to  0.000000
11/21/2012	2:05:15 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:05:15 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:05:15 PM	Tube furnace set to 0
11/21/2012	2:05:19 PM	H2 valve closed
11/21/2012	2:05:19 PM	BCl3 valve closed
11/21/2012	2:05:19 PM	PH3 valve closed
11/21/2012	2:05:19 PM	SiCl4 pre valve closed
11/21/2012	2:05:19 PM	SiCl4 post valve closed
11/21/2012	2:05:19 PM	Main Vac valve closed
11/21/2012	2:05:19 PM	Bypass valve closed
11/21/2012	2:05:19 PM	Bubbler valve closed
11/21/2012	2:05:19 PM	Helium valve opened
11/21/2012	2:05:19 PM	Helium MFC set to  500.000000
11/21/2012	2:05:19 PM	H2 MFC set to  0.000000
11/21/2012	2:05:19 PM	BCl3 MFC set to  0.000000
11/21/2012	2:05:19 PM	PH3 MFC set to  0.000000
11/21/2012	2:05:19 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:05:19 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:05:19 PM	Tube furnace set to 0
11/21/2012	2:05:19 PM	Helium valve closed
11/21/2012	2:05:19 PM	H2 valve closed
11/21/2012	2:05:19 PM	BCl3 valve closed
11/21/2012	2:05:19 PM	PH3 valve closed
11/21/2012	2:05:19 PM	SiCl4 pre valve closed
11/21/2012	2:05:19 PM	SiCl4 post valve closed
11/21/2012	2:05:19 PM	Main Vac valve closed
11/21/2012	2:05:19 PM	Bypass valve closed
11/21/2012	2:05:19 PM	Bubbler valve closed
11/21/2012	2:05:19 PM	Helium MFC set to  0.000000
11/21/2012	2:05:19 PM	H2 MFC set to  0.000000
11/21/2012	2:05:19 PM	BCl3 MFC set to  0.000000
11/21/2012	2:05:19 PM	PH3 MFC set to  0.000000
11/21/2012	2:05:19 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:05:19 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:05:19 PM	Tube furnace set to 0
11/21/2012	2:05:20 PM	Run finished at 2:05 PM
11/21/2012	2:05:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2012	2:09:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2012	2:09:27 PM	Recipe started at 2:09 PM
11/21/2012	2:09:27 PM	Helium valve closed
11/21/2012	2:09:27 PM	H2 valve closed
11/21/2012	2:09:27 PM	BCl3 valve closed
11/21/2012	2:09:27 PM	PH3 valve closed
11/21/2012	2:09:27 PM	SiCl4 pre valve closed
11/21/2012	2:09:27 PM	SiCl4 post valve closed
11/21/2012	2:09:27 PM	Main Vac valve closed
11/21/2012	2:09:27 PM	Bubbler valve closed
11/21/2012	2:09:27 PM	Bypass valve opened
11/21/2012	2:09:27 PM	Helium MFC set to  0.000000
11/21/2012	2:09:27 PM	H2 MFC set to  0.000000
11/21/2012	2:09:27 PM	BCl3 MFC set to  0.000000
11/21/2012	2:09:27 PM	PH3 MFC set to  0.000000
11/21/2012	2:09:27 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:09:27 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:09:27 PM	Tube furnace set to 0
11/21/2012	2:10:35 PM	Helium valve closed
11/21/2012	2:10:35 PM	H2 valve closed
11/21/2012	2:10:35 PM	BCl3 valve closed
11/21/2012	2:10:35 PM	PH3 valve closed
11/21/2012	2:10:35 PM	SiCl4 pre valve closed
11/21/2012	2:10:35 PM	SiCl4 post valve closed
11/21/2012	2:10:35 PM	Main Vac valve closed
11/21/2012	2:10:35 PM	Bubbler valve closed
11/21/2012	2:10:35 PM	Bypass valve opened
11/21/2012	2:10:35 PM	Helium MFC set to  0.000000
11/21/2012	2:10:35 PM	H2 MFC set to  0.000000
11/21/2012	2:10:35 PM	BCl3 MFC set to  0.000000
11/21/2012	2:10:35 PM	PH3 MFC set to  0.000000
11/21/2012	2:10:35 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:10:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:10:35 PM	Tube furnace set to 0
11/21/2012	2:11:35 PM	Helium valve closed
11/21/2012	2:11:35 PM	H2 valve closed
11/21/2012	2:11:35 PM	BCl3 valve closed
11/21/2012	2:11:35 PM	PH3 valve closed
11/21/2012	2:11:35 PM	SiCl4 pre valve closed
11/21/2012	2:11:35 PM	SiCl4 post valve closed
11/21/2012	2:11:35 PM	Bypass valve closed
11/21/2012	2:11:35 PM	Bubbler valve closed
11/21/2012	2:11:35 PM	Main Vac valve opened
11/21/2012	2:11:35 PM	Helium MFC set to  0.000000
11/21/2012	2:11:35 PM	H2 MFC set to  0.000000
11/21/2012	2:11:35 PM	BCl3 MFC set to  0.000000
11/21/2012	2:11:35 PM	PH3 MFC set to  0.000000
11/21/2012	2:11:35 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:11:35 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:11:35 PM	Tube furnace set to 0
11/21/2012	2:11:36 PM	Run finished at 2:11 PM
11/21/2012	2:11:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2012	2:18:18 PM	Recipe started at 2:18 PM
11/21/2012	2:18:18 PM	Helium valve closed
11/21/2012	2:18:18 PM	H2 valve closed
11/21/2012	2:18:18 PM	BCl3 valve closed
11/21/2012	2:18:18 PM	PH3 valve closed
11/21/2012	2:18:18 PM	SiCl4 pre valve closed
11/21/2012	2:18:18 PM	SiCl4 post valve closed
11/21/2012	2:18:18 PM	Bypass valve closed
11/21/2012	2:18:18 PM	Bubbler valve closed
11/21/2012	2:18:18 PM	Main Vac valve opened
11/21/2012	2:18:18 PM	Helium MFC set to  0.000000
11/21/2012	2:18:18 PM	H2 MFC set to  0.000000
11/21/2012	2:18:18 PM	BCl3 MFC set to  0.000000
11/21/2012	2:18:18 PM	PH3 MFC set to  0.000000
11/21/2012	2:18:18 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:18:18 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:18:18 PM	Tube furnace set to 150
11/21/2012	2:46:27 PM	H2 valve closed
11/21/2012	2:46:27 PM	BCl3 valve closed
11/21/2012	2:46:27 PM	PH3 valve closed
11/21/2012	2:46:27 PM	SiCl4 pre valve closed
11/21/2012	2:46:27 PM	SiCl4 post valve closed
11/21/2012	2:46:27 PM	Bypass valve closed
11/21/2012	2:46:27 PM	Bubbler valve closed
11/21/2012	2:46:27 PM	Helium valve opened
11/21/2012	2:46:27 PM	Main Vac valve opened
11/21/2012	2:46:27 PM	Helium MFC set to  20.000000
11/21/2012	2:46:27 PM	H2 MFC set to  0.000000
11/21/2012	2:46:27 PM	BCl3 MFC set to  0.000000
11/21/2012	2:46:27 PM	PH3 MFC set to  0.000000
11/21/2012	2:46:27 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:46:27 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:46:27 PM	Tube furnace set to 150
11/21/2012	2:46:57 PM	Helium valve closed
11/21/2012	2:46:57 PM	H2 valve closed
11/21/2012	2:46:57 PM	BCl3 valve closed
11/21/2012	2:46:57 PM	PH3 valve closed
11/21/2012	2:46:57 PM	SiCl4 pre valve closed
11/21/2012	2:46:57 PM	SiCl4 post valve closed
11/21/2012	2:46:57 PM	Bypass valve closed
11/21/2012	2:46:57 PM	Bubbler valve closed
11/21/2012	2:46:57 PM	Main Vac valve opened
11/21/2012	2:46:57 PM	Helium MFC set to  0.000000
11/21/2012	2:46:57 PM	H2 MFC set to  0.000000
11/21/2012	2:46:57 PM	BCl3 MFC set to  0.000000
11/21/2012	2:46:57 PM	PH3 MFC set to  0.000000
11/21/2012	2:46:57 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:46:57 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:46:57 PM	Tube furnace set to 150
11/21/2012	2:47:27 PM	H2 valve closed
11/21/2012	2:47:27 PM	BCl3 valve closed
11/21/2012	2:47:27 PM	PH3 valve closed
11/21/2012	2:47:27 PM	SiCl4 pre valve closed
11/21/2012	2:47:27 PM	SiCl4 post valve closed
11/21/2012	2:47:27 PM	Bypass valve closed
11/21/2012	2:47:27 PM	Bubbler valve closed
11/21/2012	2:47:27 PM	Helium valve opened
11/21/2012	2:47:27 PM	Main Vac valve opened
11/21/2012	2:47:27 PM	Helium MFC set to  20.000000
11/21/2012	2:47:27 PM	H2 MFC set to  0.000000
11/21/2012	2:47:27 PM	BCl3 MFC set to  0.000000
11/21/2012	2:47:27 PM	PH3 MFC set to  0.000000
11/21/2012	2:47:27 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:47:27 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:47:27 PM	Tube furnace set to 150
11/21/2012	2:47:58 PM	Helium valve closed
11/21/2012	2:47:58 PM	H2 valve closed
11/21/2012	2:47:58 PM	BCl3 valve closed
11/21/2012	2:47:58 PM	PH3 valve closed
11/21/2012	2:47:58 PM	SiCl4 pre valve closed
11/21/2012	2:47:58 PM	SiCl4 post valve closed
11/21/2012	2:47:58 PM	Bypass valve closed
11/21/2012	2:47:58 PM	Bubbler valve closed
11/21/2012	2:47:58 PM	Main Vac valve opened
11/21/2012	2:47:58 PM	Helium MFC set to  0.000000
11/21/2012	2:47:58 PM	H2 MFC set to  0.000000
11/21/2012	2:47:58 PM	BCl3 MFC set to  0.000000
11/21/2012	2:47:58 PM	PH3 MFC set to  0.000000
11/21/2012	2:47:58 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:47:58 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:47:58 PM	Tube furnace set to 150
11/21/2012	2:48:28 PM	H2 valve closed
11/21/2012	2:48:28 PM	BCl3 valve closed
11/21/2012	2:48:28 PM	PH3 valve closed
11/21/2012	2:48:28 PM	SiCl4 pre valve closed
11/21/2012	2:48:28 PM	SiCl4 post valve closed
11/21/2012	2:48:28 PM	Bypass valve closed
11/21/2012	2:48:28 PM	Bubbler valve closed
11/21/2012	2:48:28 PM	Helium valve opened
11/21/2012	2:48:28 PM	Main Vac valve opened
11/21/2012	2:48:28 PM	Helium MFC set to  20.000000
11/21/2012	2:48:28 PM	H2 MFC set to  0.000000
11/21/2012	2:48:28 PM	BCl3 MFC set to  0.000000
11/21/2012	2:48:28 PM	PH3 MFC set to  0.000000
11/21/2012	2:48:28 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:48:28 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:48:28 PM	Tube furnace set to 150
11/21/2012	2:48:58 PM	Helium valve closed
11/21/2012	2:48:58 PM	H2 valve closed
11/21/2012	2:48:58 PM	BCl3 valve closed
11/21/2012	2:48:58 PM	PH3 valve closed
11/21/2012	2:48:58 PM	SiCl4 pre valve closed
11/21/2012	2:48:58 PM	SiCl4 post valve closed
11/21/2012	2:48:58 PM	Bypass valve closed
11/21/2012	2:48:58 PM	Bubbler valve closed
11/21/2012	2:48:58 PM	Main Vac valve opened
11/21/2012	2:48:58 PM	Helium MFC set to  0.000000
11/21/2012	2:48:58 PM	H2 MFC set to  0.000000
11/21/2012	2:48:58 PM	BCl3 MFC set to  0.000000
11/21/2012	2:48:58 PM	PH3 MFC set to  0.000000
11/21/2012	2:48:58 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:48:58 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:48:58 PM	Tube furnace set to 150
11/21/2012	2:49:28 PM	H2 valve closed
11/21/2012	2:49:28 PM	BCl3 valve closed
11/21/2012	2:49:28 PM	PH3 valve closed
11/21/2012	2:49:28 PM	SiCl4 pre valve closed
11/21/2012	2:49:28 PM	SiCl4 post valve closed
11/21/2012	2:49:28 PM	Bypass valve closed
11/21/2012	2:49:28 PM	Bubbler valve closed
11/21/2012	2:49:28 PM	Helium valve opened
11/21/2012	2:49:28 PM	Main Vac valve opened
11/21/2012	2:49:28 PM	Helium MFC set to  20.000000
11/21/2012	2:49:28 PM	H2 MFC set to  0.000000
11/21/2012	2:49:28 PM	BCl3 MFC set to  0.000000
11/21/2012	2:49:28 PM	PH3 MFC set to  0.000000
11/21/2012	2:49:28 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:49:28 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:49:28 PM	Tube furnace set to 150
11/21/2012	2:49:59 PM	Helium valve closed
11/21/2012	2:49:59 PM	H2 valve closed
11/21/2012	2:49:59 PM	BCl3 valve closed
11/21/2012	2:49:59 PM	PH3 valve closed
11/21/2012	2:49:59 PM	SiCl4 pre valve closed
11/21/2012	2:49:59 PM	SiCl4 post valve closed
11/21/2012	2:49:59 PM	Bypass valve closed
11/21/2012	2:49:59 PM	Bubbler valve closed
11/21/2012	2:49:59 PM	Main Vac valve opened
11/21/2012	2:49:59 PM	Helium MFC set to  0.000000
11/21/2012	2:49:59 PM	H2 MFC set to  0.000000
11/21/2012	2:49:59 PM	BCl3 MFC set to  0.000000
11/21/2012	2:49:59 PM	PH3 MFC set to  0.000000
11/21/2012	2:49:59 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:49:59 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:49:59 PM	Tube furnace set to 150
11/21/2012	2:50:29 PM	H2 valve closed
11/21/2012	2:50:29 PM	BCl3 valve closed
11/21/2012	2:50:29 PM	PH3 valve closed
11/21/2012	2:50:29 PM	SiCl4 pre valve closed
11/21/2012	2:50:29 PM	SiCl4 post valve closed
11/21/2012	2:50:29 PM	Bypass valve closed
11/21/2012	2:50:29 PM	Bubbler valve closed
11/21/2012	2:50:29 PM	Helium valve opened
11/21/2012	2:50:29 PM	Main Vac valve opened
11/21/2012	2:50:29 PM	Helium MFC set to  20.000000
11/21/2012	2:50:29 PM	H2 MFC set to  0.000000
11/21/2012	2:50:29 PM	BCl3 MFC set to  0.000000
11/21/2012	2:50:29 PM	PH3 MFC set to  0.000000
11/21/2012	2:50:29 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:50:29 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:50:29 PM	Tube furnace set to 150
11/21/2012	2:50:59 PM	Helium valve closed
11/21/2012	2:50:59 PM	H2 valve closed
11/21/2012	2:50:59 PM	BCl3 valve closed
11/21/2012	2:50:59 PM	PH3 valve closed
11/21/2012	2:50:59 PM	SiCl4 pre valve closed
11/21/2012	2:50:59 PM	SiCl4 post valve closed
11/21/2012	2:50:59 PM	Bypass valve closed
11/21/2012	2:50:59 PM	Bubbler valve closed
11/21/2012	2:50:59 PM	Main Vac valve opened
11/21/2012	2:50:59 PM	Helium MFC set to  0.000000
11/21/2012	2:50:59 PM	H2 MFC set to  0.000000
11/21/2012	2:50:59 PM	BCl3 MFC set to  0.000000
11/21/2012	2:50:59 PM	PH3 MFC set to  0.000000
11/21/2012	2:50:59 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:50:59 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:50:59 PM	Tube furnace set to 150
11/21/2012	2:51:29 PM	H2 valve closed
11/21/2012	2:51:29 PM	BCl3 valve closed
11/21/2012	2:51:29 PM	PH3 valve closed
11/21/2012	2:51:29 PM	SiCl4 pre valve closed
11/21/2012	2:51:29 PM	SiCl4 post valve closed
11/21/2012	2:51:29 PM	Bypass valve closed
11/21/2012	2:51:29 PM	Bubbler valve closed
11/21/2012	2:51:29 PM	Helium valve opened
11/21/2012	2:51:29 PM	Main Vac valve opened
11/21/2012	2:51:29 PM	Helium MFC set to  20.000000
11/21/2012	2:51:29 PM	H2 MFC set to  0.000000
11/21/2012	2:51:29 PM	BCl3 MFC set to  0.000000
11/21/2012	2:51:29 PM	PH3 MFC set to  0.000000
11/21/2012	2:51:29 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:51:29 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:51:30 PM	Tube furnace set to 150
11/21/2012	2:52:00 PM	Helium valve closed
11/21/2012	2:52:00 PM	H2 valve closed
11/21/2012	2:52:00 PM	BCl3 valve closed
11/21/2012	2:52:00 PM	PH3 valve closed
11/21/2012	2:52:00 PM	SiCl4 pre valve closed
11/21/2012	2:52:00 PM	SiCl4 post valve closed
11/21/2012	2:52:00 PM	Bypass valve closed
11/21/2012	2:52:00 PM	Bubbler valve closed
11/21/2012	2:52:00 PM	Main Vac valve opened
11/21/2012	2:52:00 PM	Helium MFC set to  0.000000
11/21/2012	2:52:00 PM	H2 MFC set to  0.000000
11/21/2012	2:52:00 PM	BCl3 MFC set to  0.000000
11/21/2012	2:52:00 PM	PH3 MFC set to  0.000000
11/21/2012	2:52:00 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:52:00 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:52:00 PM	Tube furnace set to 150
11/21/2012	2:52:30 PM	H2 valve closed
11/21/2012	2:52:30 PM	BCl3 valve closed
11/21/2012	2:52:30 PM	PH3 valve closed
11/21/2012	2:52:30 PM	SiCl4 pre valve closed
11/21/2012	2:52:30 PM	SiCl4 post valve closed
11/21/2012	2:52:30 PM	Bypass valve closed
11/21/2012	2:52:30 PM	Bubbler valve closed
11/21/2012	2:52:30 PM	Helium valve opened
11/21/2012	2:52:30 PM	Main Vac valve opened
11/21/2012	2:52:30 PM	Helium MFC set to  20.000000
11/21/2012	2:52:30 PM	H2 MFC set to  0.000000
11/21/2012	2:52:30 PM	BCl3 MFC set to  0.000000
11/21/2012	2:52:30 PM	PH3 MFC set to  0.000000
11/21/2012	2:52:30 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:52:30 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:52:30 PM	Tube furnace set to 150
11/21/2012	2:53:00 PM	Helium valve closed
11/21/2012	2:53:00 PM	H2 valve closed
11/21/2012	2:53:00 PM	BCl3 valve closed
11/21/2012	2:53:00 PM	PH3 valve closed
11/21/2012	2:53:00 PM	SiCl4 pre valve closed
11/21/2012	2:53:00 PM	SiCl4 post valve closed
11/21/2012	2:53:00 PM	Bypass valve closed
11/21/2012	2:53:00 PM	Bubbler valve closed
11/21/2012	2:53:00 PM	Main Vac valve opened
11/21/2012	2:53:00 PM	Helium MFC set to  0.000000
11/21/2012	2:53:00 PM	H2 MFC set to  0.000000
11/21/2012	2:53:00 PM	BCl3 MFC set to  0.000000
11/21/2012	2:53:00 PM	PH3 MFC set to  0.000000
11/21/2012	2:53:00 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:53:00 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:53:00 PM	Tube furnace set to 150
11/21/2012	2:53:30 PM	H2 valve closed
11/21/2012	2:53:30 PM	BCl3 valve closed
11/21/2012	2:53:30 PM	PH3 valve closed
11/21/2012	2:53:30 PM	SiCl4 pre valve closed
11/21/2012	2:53:30 PM	SiCl4 post valve closed
11/21/2012	2:53:30 PM	Bypass valve closed
11/21/2012	2:53:30 PM	Bubbler valve closed
11/21/2012	2:53:30 PM	Helium valve opened
11/21/2012	2:53:30 PM	Main Vac valve opened
11/21/2012	2:53:30 PM	Helium MFC set to  20.000000
11/21/2012	2:53:30 PM	H2 MFC set to  0.000000
11/21/2012	2:53:30 PM	BCl3 MFC set to  0.000000
11/21/2012	2:53:30 PM	PH3 MFC set to  0.000000
11/21/2012	2:53:30 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:53:30 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:53:31 PM	Tube furnace set to 150
11/21/2012	2:54:01 PM	Helium valve closed
11/21/2012	2:54:01 PM	H2 valve closed
11/21/2012	2:54:01 PM	BCl3 valve closed
11/21/2012	2:54:01 PM	PH3 valve closed
11/21/2012	2:54:01 PM	SiCl4 pre valve closed
11/21/2012	2:54:01 PM	SiCl4 post valve closed
11/21/2012	2:54:01 PM	Bypass valve closed
11/21/2012	2:54:01 PM	Bubbler valve closed
11/21/2012	2:54:01 PM	Main Vac valve opened
11/21/2012	2:54:01 PM	Helium MFC set to  0.000000
11/21/2012	2:54:01 PM	H2 MFC set to  0.000000
11/21/2012	2:54:01 PM	BCl3 MFC set to  0.000000
11/21/2012	2:54:01 PM	PH3 MFC set to  0.000000
11/21/2012	2:54:01 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:54:01 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:54:01 PM	Tube furnace set to 150
11/21/2012	2:54:31 PM	H2 valve closed
11/21/2012	2:54:31 PM	BCl3 valve closed
11/21/2012	2:54:31 PM	PH3 valve closed
11/21/2012	2:54:31 PM	SiCl4 pre valve closed
11/21/2012	2:54:31 PM	SiCl4 post valve closed
11/21/2012	2:54:31 PM	Bypass valve closed
11/21/2012	2:54:31 PM	Bubbler valve closed
11/21/2012	2:54:31 PM	Helium valve opened
11/21/2012	2:54:31 PM	Main Vac valve opened
11/21/2012	2:54:31 PM	Helium MFC set to  20.000000
11/21/2012	2:54:31 PM	H2 MFC set to  0.000000
11/21/2012	2:54:31 PM	BCl3 MFC set to  0.000000
11/21/2012	2:54:31 PM	PH3 MFC set to  0.000000
11/21/2012	2:54:31 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:54:31 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:54:31 PM	Tube furnace set to 150
11/21/2012	2:55:01 PM	Helium valve closed
11/21/2012	2:55:01 PM	H2 valve closed
11/21/2012	2:55:01 PM	BCl3 valve closed
11/21/2012	2:55:01 PM	PH3 valve closed
11/21/2012	2:55:01 PM	SiCl4 pre valve closed
11/21/2012	2:55:01 PM	SiCl4 post valve closed
11/21/2012	2:55:01 PM	Bypass valve closed
11/21/2012	2:55:01 PM	Bubbler valve closed
11/21/2012	2:55:01 PM	Main Vac valve opened
11/21/2012	2:55:01 PM	Helium MFC set to  0.000000
11/21/2012	2:55:01 PM	H2 MFC set to  0.000000
11/21/2012	2:55:01 PM	BCl3 MFC set to  0.000000
11/21/2012	2:55:01 PM	PH3 MFC set to  0.000000
11/21/2012	2:55:01 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:55:01 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:55:01 PM	Tube furnace set to 150
11/21/2012	2:55:31 PM	H2 valve closed
11/21/2012	2:55:31 PM	BCl3 valve closed
11/21/2012	2:55:31 PM	PH3 valve closed
11/21/2012	2:55:31 PM	SiCl4 pre valve closed
11/21/2012	2:55:31 PM	SiCl4 post valve closed
11/21/2012	2:55:31 PM	Bypass valve closed
11/21/2012	2:55:31 PM	Bubbler valve closed
11/21/2012	2:55:31 PM	Helium valve opened
11/21/2012	2:55:31 PM	Main Vac valve opened
11/21/2012	2:55:31 PM	Helium MFC set to  20.000000
11/21/2012	2:55:31 PM	H2 MFC set to  0.000000
11/21/2012	2:55:31 PM	BCl3 MFC set to  0.000000
11/21/2012	2:55:31 PM	PH3 MFC set to  0.000000
11/21/2012	2:55:31 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:55:31 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:55:32 PM	Tube furnace set to 150
11/21/2012	2:56:02 PM	Helium valve closed
11/21/2012	2:56:02 PM	H2 valve closed
11/21/2012	2:56:02 PM	BCl3 valve closed
11/21/2012	2:56:02 PM	PH3 valve closed
11/21/2012	2:56:02 PM	SiCl4 pre valve closed
11/21/2012	2:56:02 PM	SiCl4 post valve closed
11/21/2012	2:56:02 PM	Bypass valve closed
11/21/2012	2:56:02 PM	Bubbler valve closed
11/21/2012	2:56:02 PM	Main Vac valve opened
11/21/2012	2:56:02 PM	Helium MFC set to  0.000000
11/21/2012	2:56:02 PM	H2 MFC set to  0.000000
11/21/2012	2:56:02 PM	BCl3 MFC set to  0.000000
11/21/2012	2:56:02 PM	PH3 MFC set to  0.000000
11/21/2012	2:56:02 PM	SiCl4 MFC set to  0.000000
11/21/2012	2:56:02 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	2:56:02 PM	Tube furnace set to 150
11/21/2012	2:56:03 PM	Run finished at 2:56 PM
11/21/2012	3:00:49 PM	Recipe started at 3:00 PM
11/21/2012	3:00:49 PM	Helium valve closed
11/21/2012	3:00:49 PM	H2 valve closed
11/21/2012	3:00:49 PM	BCl3 valve closed
11/21/2012	3:00:49 PM	PH3 valve closed
11/21/2012	3:00:49 PM	SiCl4 pre valve closed
11/21/2012	3:00:49 PM	SiCl4 post valve closed
11/21/2012	3:00:49 PM	Bypass valve closed
11/21/2012	3:00:49 PM	Bubbler valve closed
11/21/2012	3:00:49 PM	Main Vac valve opened
11/21/2012	3:00:49 PM	Helium MFC set to  0.000000
11/21/2012	3:00:49 PM	H2 MFC set to  0.000000
11/21/2012	3:00:49 PM	BCl3 MFC set to  0.000000
11/21/2012	3:00:49 PM	PH3 MFC set to  0.000000
11/21/2012	3:00:49 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:00:49 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:00:49 PM	Tube furnace set to 150
11/21/2012	3:01:19 PM	H2 valve closed
11/21/2012	3:01:19 PM	BCl3 valve closed
11/21/2012	3:01:19 PM	PH3 valve closed
11/21/2012	3:01:19 PM	SiCl4 pre valve closed
11/21/2012	3:01:19 PM	SiCl4 post valve closed
11/21/2012	3:01:19 PM	Bypass valve closed
11/21/2012	3:01:19 PM	Bubbler valve closed
11/21/2012	3:01:19 PM	Helium valve opened
11/21/2012	3:01:19 PM	Main Vac valve opened
11/21/2012	3:01:19 PM	Helium MFC set to  20.000000
11/21/2012	3:01:19 PM	H2 MFC set to  0.000000
11/21/2012	3:01:19 PM	BCl3 MFC set to  0.000000
11/21/2012	3:01:19 PM	PH3 MFC set to  0.000000
11/21/2012	3:01:19 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:01:19 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:01:19 PM	Tube furnace set to 150
11/21/2012	3:01:49 PM	Helium valve closed
11/21/2012	3:01:49 PM	H2 valve closed
11/21/2012	3:01:49 PM	BCl3 valve closed
11/21/2012	3:01:49 PM	PH3 valve closed
11/21/2012	3:01:49 PM	SiCl4 pre valve closed
11/21/2012	3:01:49 PM	SiCl4 post valve closed
11/21/2012	3:01:49 PM	Bypass valve closed
11/21/2012	3:01:49 PM	Bubbler valve closed
11/21/2012	3:01:49 PM	Main Vac valve opened
11/21/2012	3:01:49 PM	Helium MFC set to  0.000000
11/21/2012	3:01:49 PM	H2 MFC set to  0.000000
11/21/2012	3:01:49 PM	BCl3 MFC set to  0.000000
11/21/2012	3:01:49 PM	PH3 MFC set to  0.000000
11/21/2012	3:01:49 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:01:49 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:01:50 PM	Tube furnace set to 150
11/21/2012	3:02:20 PM	H2 valve closed
11/21/2012	3:02:20 PM	BCl3 valve closed
11/21/2012	3:02:20 PM	PH3 valve closed
11/21/2012	3:02:20 PM	SiCl4 pre valve closed
11/21/2012	3:02:20 PM	SiCl4 post valve closed
11/21/2012	3:02:20 PM	Bypass valve closed
11/21/2012	3:02:20 PM	Bubbler valve closed
11/21/2012	3:02:20 PM	Helium valve opened
11/21/2012	3:02:20 PM	Main Vac valve opened
11/21/2012	3:02:20 PM	Helium MFC set to  20.000000
11/21/2012	3:02:20 PM	H2 MFC set to  0.000000
11/21/2012	3:02:20 PM	BCl3 MFC set to  0.000000
11/21/2012	3:02:20 PM	PH3 MFC set to  0.000000
11/21/2012	3:02:20 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:02:20 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:02:20 PM	Tube furnace set to 150
11/21/2012	3:02:50 PM	Helium valve closed
11/21/2012	3:02:50 PM	H2 valve closed
11/21/2012	3:02:50 PM	BCl3 valve closed
11/21/2012	3:02:50 PM	PH3 valve closed
11/21/2012	3:02:50 PM	SiCl4 pre valve closed
11/21/2012	3:02:50 PM	SiCl4 post valve closed
11/21/2012	3:02:50 PM	Bypass valve closed
11/21/2012	3:02:50 PM	Bubbler valve closed
11/21/2012	3:02:50 PM	Main Vac valve opened
11/21/2012	3:02:50 PM	Helium MFC set to  0.000000
11/21/2012	3:02:50 PM	H2 MFC set to  0.000000
11/21/2012	3:02:50 PM	BCl3 MFC set to  0.000000
11/21/2012	3:02:50 PM	PH3 MFC set to  0.000000
11/21/2012	3:02:50 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:02:50 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:02:50 PM	Tube furnace set to 150
11/21/2012	3:03:20 PM	H2 valve closed
11/21/2012	3:03:20 PM	BCl3 valve closed
11/21/2012	3:03:20 PM	PH3 valve closed
11/21/2012	3:03:20 PM	SiCl4 pre valve closed
11/21/2012	3:03:20 PM	SiCl4 post valve closed
11/21/2012	3:03:20 PM	Bypass valve closed
11/21/2012	3:03:20 PM	Bubbler valve closed
11/21/2012	3:03:20 PM	Helium valve opened
11/21/2012	3:03:20 PM	Main Vac valve opened
11/21/2012	3:03:20 PM	Helium MFC set to  20.000000
11/21/2012	3:03:20 PM	H2 MFC set to  0.000000
11/21/2012	3:03:20 PM	BCl3 MFC set to  0.000000
11/21/2012	3:03:20 PM	PH3 MFC set to  0.000000
11/21/2012	3:03:20 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:03:20 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:03:20 PM	Tube furnace set to 150
11/21/2012	3:03:50 PM	Helium valve closed
11/21/2012	3:03:50 PM	H2 valve closed
11/21/2012	3:03:50 PM	BCl3 valve closed
11/21/2012	3:03:50 PM	PH3 valve closed
11/21/2012	3:03:50 PM	SiCl4 pre valve closed
11/21/2012	3:03:50 PM	SiCl4 post valve closed
11/21/2012	3:03:50 PM	Bypass valve closed
11/21/2012	3:03:50 PM	Bubbler valve closed
11/21/2012	3:03:50 PM	Main Vac valve opened
11/21/2012	3:03:50 PM	Helium MFC set to  0.000000
11/21/2012	3:03:50 PM	H2 MFC set to  0.000000
11/21/2012	3:03:50 PM	BCl3 MFC set to  0.000000
11/21/2012	3:03:50 PM	PH3 MFC set to  0.000000
11/21/2012	3:03:50 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:03:50 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:03:51 PM	Tube furnace set to 150
11/21/2012	3:04:21 PM	H2 valve closed
11/21/2012	3:04:21 PM	BCl3 valve closed
11/21/2012	3:04:21 PM	PH3 valve closed
11/21/2012	3:04:21 PM	SiCl4 pre valve closed
11/21/2012	3:04:21 PM	SiCl4 post valve closed
11/21/2012	3:04:21 PM	Bypass valve closed
11/21/2012	3:04:21 PM	Bubbler valve closed
11/21/2012	3:04:21 PM	Helium valve opened
11/21/2012	3:04:21 PM	Main Vac valve opened
11/21/2012	3:04:21 PM	Helium MFC set to  20.000000
11/21/2012	3:04:21 PM	H2 MFC set to  0.000000
11/21/2012	3:04:21 PM	BCl3 MFC set to  0.000000
11/21/2012	3:04:21 PM	PH3 MFC set to  0.000000
11/21/2012	3:04:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:04:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:04:21 PM	Tube furnace set to 150
11/21/2012	3:04:51 PM	Helium valve closed
11/21/2012	3:04:51 PM	H2 valve closed
11/21/2012	3:04:51 PM	BCl3 valve closed
11/21/2012	3:04:51 PM	PH3 valve closed
11/21/2012	3:04:51 PM	SiCl4 pre valve closed
11/21/2012	3:04:51 PM	SiCl4 post valve closed
11/21/2012	3:04:51 PM	Bypass valve closed
11/21/2012	3:04:51 PM	Bubbler valve closed
11/21/2012	3:04:51 PM	Main Vac valve opened
11/21/2012	3:04:51 PM	Helium MFC set to  0.000000
11/21/2012	3:04:51 PM	H2 MFC set to  0.000000
11/21/2012	3:04:51 PM	BCl3 MFC set to  0.000000
11/21/2012	3:04:51 PM	PH3 MFC set to  0.000000
11/21/2012	3:04:51 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:04:51 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:04:51 PM	Tube furnace set to 150
11/21/2012	3:05:21 PM	H2 valve closed
11/21/2012	3:05:21 PM	BCl3 valve closed
11/21/2012	3:05:21 PM	PH3 valve closed
11/21/2012	3:05:21 PM	SiCl4 pre valve closed
11/21/2012	3:05:21 PM	SiCl4 post valve closed
11/21/2012	3:05:21 PM	Bypass valve closed
11/21/2012	3:05:21 PM	Bubbler valve closed
11/21/2012	3:05:21 PM	Helium valve opened
11/21/2012	3:05:21 PM	Main Vac valve opened
11/21/2012	3:05:21 PM	Helium MFC set to  20.000000
11/21/2012	3:05:21 PM	H2 MFC set to  0.000000
11/21/2012	3:05:21 PM	BCl3 MFC set to  0.000000
11/21/2012	3:05:21 PM	PH3 MFC set to  0.000000
11/21/2012	3:05:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:05:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:05:21 PM	Tube furnace set to 150
11/21/2012	3:05:51 PM	Helium valve closed
11/21/2012	3:05:51 PM	H2 valve closed
11/21/2012	3:05:51 PM	BCl3 valve closed
11/21/2012	3:05:51 PM	PH3 valve closed
11/21/2012	3:05:51 PM	SiCl4 pre valve closed
11/21/2012	3:05:51 PM	SiCl4 post valve closed
11/21/2012	3:05:51 PM	Bypass valve closed
11/21/2012	3:05:51 PM	Bubbler valve closed
11/21/2012	3:05:51 PM	Main Vac valve opened
11/21/2012	3:05:51 PM	Helium MFC set to  0.000000
11/21/2012	3:05:51 PM	H2 MFC set to  0.000000
11/21/2012	3:05:51 PM	BCl3 MFC set to  0.000000
11/21/2012	3:05:51 PM	PH3 MFC set to  0.000000
11/21/2012	3:05:51 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:05:51 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:05:52 PM	Tube furnace set to 150
11/21/2012	3:06:22 PM	H2 valve closed
11/21/2012	3:06:22 PM	BCl3 valve closed
11/21/2012	3:06:22 PM	PH3 valve closed
11/21/2012	3:06:22 PM	SiCl4 pre valve closed
11/21/2012	3:06:22 PM	SiCl4 post valve closed
11/21/2012	3:06:22 PM	Bypass valve closed
11/21/2012	3:06:22 PM	Bubbler valve closed
11/21/2012	3:06:22 PM	Helium valve opened
11/21/2012	3:06:22 PM	Main Vac valve opened
11/21/2012	3:06:22 PM	Helium MFC set to  20.000000
11/21/2012	3:06:22 PM	H2 MFC set to  0.000000
11/21/2012	3:06:22 PM	BCl3 MFC set to  0.000000
11/21/2012	3:06:22 PM	PH3 MFC set to  0.000000
11/21/2012	3:06:22 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:06:22 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:06:22 PM	Tube furnace set to 150
11/21/2012	3:06:52 PM	Helium valve closed
11/21/2012	3:06:52 PM	H2 valve closed
11/21/2012	3:06:52 PM	BCl3 valve closed
11/21/2012	3:06:52 PM	PH3 valve closed
11/21/2012	3:06:52 PM	SiCl4 pre valve closed
11/21/2012	3:06:52 PM	SiCl4 post valve closed
11/21/2012	3:06:52 PM	Bypass valve closed
11/21/2012	3:06:52 PM	Bubbler valve closed
11/21/2012	3:06:52 PM	Main Vac valve opened
11/21/2012	3:06:52 PM	Helium MFC set to  0.000000
11/21/2012	3:06:52 PM	H2 MFC set to  0.000000
11/21/2012	3:06:52 PM	BCl3 MFC set to  0.000000
11/21/2012	3:06:52 PM	PH3 MFC set to  0.000000
11/21/2012	3:06:52 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:06:52 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:06:52 PM	Tube furnace set to 150
11/21/2012	3:07:22 PM	H2 valve closed
11/21/2012	3:07:22 PM	BCl3 valve closed
11/21/2012	3:07:22 PM	PH3 valve closed
11/21/2012	3:07:22 PM	SiCl4 pre valve closed
11/21/2012	3:07:22 PM	SiCl4 post valve closed
11/21/2012	3:07:22 PM	Bypass valve closed
11/21/2012	3:07:22 PM	Bubbler valve closed
11/21/2012	3:07:22 PM	Helium valve opened
11/21/2012	3:07:22 PM	Main Vac valve opened
11/21/2012	3:07:22 PM	Helium MFC set to  20.000000
11/21/2012	3:07:22 PM	H2 MFC set to  0.000000
11/21/2012	3:07:22 PM	BCl3 MFC set to  0.000000
11/21/2012	3:07:22 PM	PH3 MFC set to  0.000000
11/21/2012	3:07:22 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:07:22 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:07:22 PM	Tube furnace set to 150
11/21/2012	3:07:52 PM	Helium valve closed
11/21/2012	3:07:52 PM	H2 valve closed
11/21/2012	3:07:52 PM	BCl3 valve closed
11/21/2012	3:07:52 PM	PH3 valve closed
11/21/2012	3:07:52 PM	SiCl4 pre valve closed
11/21/2012	3:07:52 PM	SiCl4 post valve closed
11/21/2012	3:07:52 PM	Bypass valve closed
11/21/2012	3:07:52 PM	Bubbler valve closed
11/21/2012	3:07:52 PM	Main Vac valve opened
11/21/2012	3:07:52 PM	Helium MFC set to  0.000000
11/21/2012	3:07:52 PM	H2 MFC set to  0.000000
11/21/2012	3:07:52 PM	BCl3 MFC set to  0.000000
11/21/2012	3:07:52 PM	PH3 MFC set to  0.000000
11/21/2012	3:07:52 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:07:52 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:07:53 PM	Tube furnace set to 150
11/21/2012	3:08:23 PM	H2 valve closed
11/21/2012	3:08:23 PM	BCl3 valve closed
11/21/2012	3:08:23 PM	PH3 valve closed
11/21/2012	3:08:23 PM	SiCl4 pre valve closed
11/21/2012	3:08:23 PM	SiCl4 post valve closed
11/21/2012	3:08:23 PM	Bypass valve closed
11/21/2012	3:08:23 PM	Bubbler valve closed
11/21/2012	3:08:23 PM	Helium valve opened
11/21/2012	3:08:23 PM	Main Vac valve opened
11/21/2012	3:08:23 PM	Helium MFC set to  20.000000
11/21/2012	3:08:23 PM	H2 MFC set to  0.000000
11/21/2012	3:08:23 PM	BCl3 MFC set to  0.000000
11/21/2012	3:08:23 PM	PH3 MFC set to  0.000000
11/21/2012	3:08:23 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:08:23 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:08:23 PM	Tube furnace set to 150
11/21/2012	3:08:53 PM	Helium valve closed
11/21/2012	3:08:53 PM	H2 valve closed
11/21/2012	3:08:53 PM	BCl3 valve closed
11/21/2012	3:08:53 PM	PH3 valve closed
11/21/2012	3:08:53 PM	SiCl4 pre valve closed
11/21/2012	3:08:53 PM	SiCl4 post valve closed
11/21/2012	3:08:53 PM	Bypass valve closed
11/21/2012	3:08:53 PM	Bubbler valve closed
11/21/2012	3:08:53 PM	Main Vac valve opened
11/21/2012	3:08:53 PM	Helium MFC set to  0.000000
11/21/2012	3:08:53 PM	H2 MFC set to  0.000000
11/21/2012	3:08:53 PM	BCl3 MFC set to  0.000000
11/21/2012	3:08:53 PM	PH3 MFC set to  0.000000
11/21/2012	3:08:53 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:08:53 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:08:53 PM	Tube furnace set to 150
11/21/2012	3:09:23 PM	H2 valve closed
11/21/2012	3:09:23 PM	BCl3 valve closed
11/21/2012	3:09:23 PM	PH3 valve closed
11/21/2012	3:09:23 PM	SiCl4 pre valve closed
11/21/2012	3:09:23 PM	SiCl4 post valve closed
11/21/2012	3:09:23 PM	Bypass valve closed
11/21/2012	3:09:23 PM	Bubbler valve closed
11/21/2012	3:09:23 PM	Helium valve opened
11/21/2012	3:09:23 PM	Main Vac valve opened
11/21/2012	3:09:23 PM	Helium MFC set to  20.000000
11/21/2012	3:09:23 PM	H2 MFC set to  0.000000
11/21/2012	3:09:23 PM	BCl3 MFC set to  0.000000
11/21/2012	3:09:23 PM	PH3 MFC set to  0.000000
11/21/2012	3:09:23 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:09:23 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:09:23 PM	Tube furnace set to 150
11/21/2012	3:09:53 PM	Helium valve closed
11/21/2012	3:09:53 PM	H2 valve closed
11/21/2012	3:09:53 PM	BCl3 valve closed
11/21/2012	3:09:53 PM	PH3 valve closed
11/21/2012	3:09:53 PM	SiCl4 pre valve closed
11/21/2012	3:09:53 PM	SiCl4 post valve closed
11/21/2012	3:09:53 PM	Bypass valve closed
11/21/2012	3:09:53 PM	Bubbler valve closed
11/21/2012	3:09:53 PM	Main Vac valve opened
11/21/2012	3:09:53 PM	Helium MFC set to  0.000000
11/21/2012	3:09:53 PM	H2 MFC set to  0.000000
11/21/2012	3:09:53 PM	BCl3 MFC set to  0.000000
11/21/2012	3:09:53 PM	PH3 MFC set to  0.000000
11/21/2012	3:09:53 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:09:53 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:09:54 PM	Tube furnace set to 150
11/21/2012	3:10:24 PM	H2 valve closed
11/21/2012	3:10:24 PM	BCl3 valve closed
11/21/2012	3:10:24 PM	PH3 valve closed
11/21/2012	3:10:24 PM	SiCl4 pre valve closed
11/21/2012	3:10:24 PM	SiCl4 post valve closed
11/21/2012	3:10:24 PM	Bypass valve closed
11/21/2012	3:10:24 PM	Bubbler valve closed
11/21/2012	3:10:24 PM	Helium valve opened
11/21/2012	3:10:24 PM	Main Vac valve opened
11/21/2012	3:10:24 PM	Helium MFC set to  20.000000
11/21/2012	3:10:24 PM	H2 MFC set to  0.000000
11/21/2012	3:10:24 PM	BCl3 MFC set to  0.000000
11/21/2012	3:10:24 PM	PH3 MFC set to  0.000000
11/21/2012	3:10:24 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:10:24 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:10:24 PM	Tube furnace set to 150
11/21/2012	3:10:54 PM	Helium valve closed
11/21/2012	3:10:54 PM	H2 valve closed
11/21/2012	3:10:54 PM	BCl3 valve closed
11/21/2012	3:10:54 PM	PH3 valve closed
11/21/2012	3:10:54 PM	SiCl4 pre valve closed
11/21/2012	3:10:54 PM	SiCl4 post valve closed
11/21/2012	3:10:54 PM	Bypass valve closed
11/21/2012	3:10:54 PM	Bubbler valve closed
11/21/2012	3:10:54 PM	Main Vac valve opened
11/21/2012	3:10:54 PM	Helium MFC set to  0.000000
11/21/2012	3:10:54 PM	H2 MFC set to  0.000000
11/21/2012	3:10:54 PM	BCl3 MFC set to  0.000000
11/21/2012	3:10:54 PM	PH3 MFC set to  0.000000
11/21/2012	3:10:54 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:10:54 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:10:54 PM	Tube furnace set to 150
11/21/2012	3:10:55 PM	Run finished at 3:10 PM
11/21/2012	3:16:10 PM	Main Vac valve closed
11/21/2012	3:16:20 PM	Main Vac valve opened
11/21/2012	3:17:23 PM	Recipe started at 3:17 PM
11/21/2012	3:17:23 PM	Helium valve closed
11/21/2012	3:17:23 PM	H2 valve closed
11/21/2012	3:17:23 PM	BCl3 valve closed
11/21/2012	3:17:23 PM	PH3 valve closed
11/21/2012	3:17:23 PM	SiCl4 pre valve closed
11/21/2012	3:17:23 PM	SiCl4 post valve closed
11/21/2012	3:17:23 PM	Main Vac valve closed
11/21/2012	3:17:23 PM	Bypass valve closed
11/21/2012	3:17:23 PM	Bubbler valve closed
11/21/2012	3:17:23 PM	Helium MFC set to  0.000000
11/21/2012	3:17:23 PM	H2 MFC set to  0.000000
11/21/2012	3:17:23 PM	BCl3 MFC set to  0.000000
11/21/2012	3:17:23 PM	PH3 MFC set to  0.000000
11/21/2012	3:17:23 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:17:23 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:17:23 PM	Tube furnace set to 0
11/21/2012	3:17:26 PM	Helium valve closed
11/21/2012	3:17:26 PM	BCl3 valve closed
11/21/2012	3:17:26 PM	PH3 valve closed
11/21/2012	3:17:26 PM	SiCl4 pre valve closed
11/21/2012	3:17:26 PM	SiCl4 post valve closed
11/21/2012	3:17:26 PM	Main Vac valve closed
11/21/2012	3:17:26 PM	Bypass valve closed
11/21/2012	3:17:26 PM	Bubbler valve closed
11/21/2012	3:17:27 PM	H2 valve opened
11/21/2012	3:17:27 PM	Helium MFC set to  0.000000
11/21/2012	3:17:27 PM	H2 MFC set to  500.000000
11/21/2012	3:17:27 PM	BCl3 MFC set to  0.000000
11/21/2012	3:17:27 PM	PH3 MFC set to  0.000000
11/21/2012	3:17:27 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:17:27 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:17:27 PM	Tube furnace set to 0
11/21/2012	3:18:39 PM	Helium valve closed
11/21/2012	3:18:39 PM	BCl3 valve closed
11/21/2012	3:18:39 PM	PH3 valve closed
11/21/2012	3:18:39 PM	SiCl4 pre valve closed
11/21/2012	3:18:39 PM	SiCl4 post valve closed
11/21/2012	3:18:39 PM	Main Vac valve closed
11/21/2012	3:18:39 PM	Bypass valve closed
11/21/2012	3:18:39 PM	H2 valve opened
11/21/2012	3:18:39 PM	Bubbler valve opened
11/21/2012	3:18:39 PM	Helium MFC set to  0.000000
11/21/2012	3:18:39 PM	H2 MFC set to  500.000000
11/21/2012	3:18:39 PM	BCl3 MFC set to  0.000000
11/21/2012	3:18:39 PM	PH3 MFC set to  0.000000
11/21/2012	3:18:39 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:18:39 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:18:39 PM	Tube furnace set to 0
11/21/2012	3:18:40 PM	Helium valve closed
11/21/2012	3:18:40 PM	BCl3 valve closed
11/21/2012	3:18:40 PM	PH3 valve closed
11/21/2012	3:18:40 PM	SiCl4 pre valve closed
11/21/2012	3:18:40 PM	SiCl4 post valve closed
11/21/2012	3:18:40 PM	Main Vac valve closed
11/21/2012	3:18:40 PM	Bypass valve closed
11/21/2012	3:18:40 PM	H2 valve opened
11/21/2012	3:18:40 PM	Bubbler valve opened
11/21/2012	3:18:40 PM	Helium MFC set to  0.000000
11/21/2012	3:18:40 PM	H2 MFC set to  450.000000
11/21/2012	3:18:40 PM	BCl3 MFC set to  0.000000
11/21/2012	3:18:40 PM	PH3 MFC set to  0.000000
11/21/2012	3:18:40 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:18:40 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:18:40 PM	Tube furnace set to 1000
11/21/2012	3:43:40 PM	Helium valve closed
11/21/2012	3:43:40 PM	PH3 valve closed
11/21/2012	3:43:40 PM	Main Vac valve closed
11/21/2012	3:43:40 PM	Bypass valve closed
11/21/2012	3:43:40 PM	H2 valve opened
11/21/2012	3:43:40 PM	BCl3 valve opened
11/21/2012	3:43:40 PM	SiCl4 pre valve opened
11/21/2012	3:43:40 PM	SiCl4 post valve opened
11/21/2012	3:43:40 PM	Bubbler valve opened
11/21/2012	3:43:40 PM	Helium MFC set to  0.000000
11/21/2012	3:43:40 PM	H2 MFC set to  450.000000
11/21/2012	3:43:40 PM	BCl3 MFC set to  1.500000
11/21/2012	3:43:40 PM	PH3 MFC set to  0.000000
11/21/2012	3:43:40 PM	SiCl4 MFC set to  50.000000
11/21/2012	3:43:40 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:43:41 PM	Tube furnace set to 1000
11/21/2012	3:51:41 PM	Helium valve closed
11/21/2012	3:51:41 PM	BCl3 valve closed
11/21/2012	3:51:41 PM	PH3 valve closed
11/21/2012	3:51:41 PM	SiCl4 pre valve closed
11/21/2012	3:51:41 PM	SiCl4 post valve closed
11/21/2012	3:51:41 PM	Main Vac valve closed
11/21/2012	3:51:41 PM	Bypass valve closed
11/21/2012	3:51:41 PM	H2 valve opened
11/21/2012	3:51:41 PM	Bubbler valve opened
11/21/2012	3:51:41 PM	Helium MFC set to  0.000000
11/21/2012	3:51:41 PM	H2 MFC set to  500.000000
11/21/2012	3:51:41 PM	BCl3 MFC set to  0.000000
11/21/2012	3:51:41 PM	PH3 MFC set to  0.000000
11/21/2012	3:51:41 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:51:41 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:51:41 PM	Tube furnace set to 750
11/21/2012	3:56:41 PM	H2 valve closed
11/21/2012	3:56:41 PM	BCl3 valve closed
11/21/2012	3:56:41 PM	PH3 valve closed
11/21/2012	3:56:41 PM	SiCl4 pre valve closed
11/21/2012	3:56:41 PM	SiCl4 post valve closed
11/21/2012	3:56:41 PM	Main Vac valve closed
11/21/2012	3:56:41 PM	Bypass valve closed
11/21/2012	3:56:41 PM	Helium valve opened
11/21/2012	3:56:41 PM	Bubbler valve opened
11/21/2012	3:56:41 PM	Helium MFC set to  500.000000
11/21/2012	3:56:41 PM	H2 MFC set to  0.000000
11/21/2012	3:56:41 PM	BCl3 MFC set to  0.000000
11/21/2012	3:56:41 PM	PH3 MFC set to  0.000000
11/21/2012	3:56:41 PM	SiCl4 MFC set to  0.000000
11/21/2012	3:56:41 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	3:56:41 PM	Tube furnace set to 0
11/21/2012	4:04:22 PM	Helium valve closed
11/21/2012	4:04:22 PM	H2 valve closed
11/21/2012	4:04:22 PM	BCl3 valve closed
11/21/2012	4:04:22 PM	PH3 valve closed
11/21/2012	4:04:22 PM	SiCl4 pre valve closed
11/21/2012	4:04:22 PM	SiCl4 post valve closed
11/21/2012	4:04:22 PM	Main Vac valve closed
11/21/2012	4:04:22 PM	Bypass valve closed
11/21/2012	4:04:22 PM	Bubbler valve closed
11/21/2012	4:04:22 PM	Helium MFC set to  0.000000
11/21/2012	4:04:22 PM	H2 MFC set to  0.000000
11/21/2012	4:04:22 PM	BCl3 MFC set to  0.000000
11/21/2012	4:04:22 PM	PH3 MFC set to  0.000000
11/21/2012	4:04:22 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:04:22 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:04:22 PM	Tube furnace set to 0
11/21/2012	4:04:23 PM	Run finished at 4:04 PM
11/21/2012	4:04:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2012	4:04:28 PM	Recipe started at 4:04 PM
11/21/2012	4:04:28 PM	Helium valve closed
11/21/2012	4:04:28 PM	H2 valve closed
11/21/2012	4:04:28 PM	BCl3 valve closed
11/21/2012	4:04:28 PM	PH3 valve closed
11/21/2012	4:04:28 PM	SiCl4 pre valve closed
11/21/2012	4:04:28 PM	SiCl4 post valve closed
11/21/2012	4:04:28 PM	Main Vac valve closed
11/21/2012	4:04:28 PM	Bypass valve closed
11/21/2012	4:04:28 PM	Bubbler valve closed
11/21/2012	4:04:28 PM	Helium MFC set to  0.000000
11/21/2012	4:04:28 PM	H2 MFC set to  0.000000
11/21/2012	4:04:28 PM	BCl3 MFC set to  0.000000
11/21/2012	4:04:28 PM	PH3 MFC set to  0.000000
11/21/2012	4:04:28 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:04:28 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:04:28 PM	Tube furnace set to 0
11/21/2012	4:04:31 PM	H2 valve closed
11/21/2012	4:04:31 PM	BCl3 valve closed
11/21/2012	4:04:31 PM	PH3 valve closed
11/21/2012	4:04:31 PM	SiCl4 pre valve closed
11/21/2012	4:04:31 PM	SiCl4 post valve closed
11/21/2012	4:04:31 PM	Main Vac valve closed
11/21/2012	4:04:31 PM	Bypass valve closed
11/21/2012	4:04:31 PM	Bubbler valve closed
11/21/2012	4:04:31 PM	Helium valve opened
11/21/2012	4:04:31 PM	Helium MFC set to  500.000000
11/21/2012	4:04:31 PM	H2 MFC set to  0.000000
11/21/2012	4:04:31 PM	BCl3 MFC set to  0.000000
11/21/2012	4:04:31 PM	PH3 MFC set to  0.000000
11/21/2012	4:04:31 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:04:31 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:04:32 PM	Tube furnace set to 0
11/21/2012	4:04:32 PM	Helium valve closed
11/21/2012	4:04:32 PM	H2 valve closed
11/21/2012	4:04:32 PM	BCl3 valve closed
11/21/2012	4:04:32 PM	PH3 valve closed
11/21/2012	4:04:32 PM	SiCl4 pre valve closed
11/21/2012	4:04:32 PM	SiCl4 post valve closed
11/21/2012	4:04:32 PM	Main Vac valve closed
11/21/2012	4:04:32 PM	Bypass valve closed
11/21/2012	4:04:32 PM	Bubbler valve closed
11/21/2012	4:04:32 PM	Helium MFC set to  0.000000
11/21/2012	4:04:32 PM	H2 MFC set to  0.000000
11/21/2012	4:04:32 PM	BCl3 MFC set to  0.000000
11/21/2012	4:04:32 PM	PH3 MFC set to  0.000000
11/21/2012	4:04:32 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:04:32 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:04:32 PM	Tube furnace set to 0
11/21/2012	4:04:33 PM	Run finished at 4:04 PM
11/21/2012	4:04:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2012	4:11:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2012	4:11:05 PM	Recipe started at 4:11 PM
11/21/2012	4:11:05 PM	Helium valve closed
11/21/2012	4:11:05 PM	H2 valve closed
11/21/2012	4:11:05 PM	BCl3 valve closed
11/21/2012	4:11:05 PM	PH3 valve closed
11/21/2012	4:11:05 PM	SiCl4 pre valve closed
11/21/2012	4:11:05 PM	SiCl4 post valve closed
11/21/2012	4:11:05 PM	Main Vac valve closed
11/21/2012	4:11:05 PM	Bubbler valve closed
11/21/2012	4:11:05 PM	Bypass valve opened
11/21/2012	4:11:05 PM	Helium MFC set to  0.000000
11/21/2012	4:11:05 PM	H2 MFC set to  0.000000
11/21/2012	4:11:05 PM	BCl3 MFC set to  0.000000
11/21/2012	4:11:05 PM	PH3 MFC set to  0.000000
11/21/2012	4:11:05 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:11:05 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:11:05 PM	Tube furnace set to 0
11/21/2012	4:12:13 PM	Helium valve closed
11/21/2012	4:12:13 PM	H2 valve closed
11/21/2012	4:12:13 PM	BCl3 valve closed
11/21/2012	4:12:13 PM	PH3 valve closed
11/21/2012	4:12:13 PM	SiCl4 pre valve closed
11/21/2012	4:12:13 PM	SiCl4 post valve closed
11/21/2012	4:12:13 PM	Main Vac valve closed
11/21/2012	4:12:13 PM	Bubbler valve closed
11/21/2012	4:12:13 PM	Bypass valve opened
11/21/2012	4:12:13 PM	Helium MFC set to  0.000000
11/21/2012	4:12:13 PM	H2 MFC set to  0.000000
11/21/2012	4:12:13 PM	BCl3 MFC set to  0.000000
11/21/2012	4:12:13 PM	PH3 MFC set to  0.000000
11/21/2012	4:12:13 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:12:13 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:12:13 PM	Tube furnace set to 0
11/21/2012	4:13:13 PM	Helium valve closed
11/21/2012	4:13:13 PM	H2 valve closed
11/21/2012	4:13:13 PM	BCl3 valve closed
11/21/2012	4:13:13 PM	PH3 valve closed
11/21/2012	4:13:13 PM	SiCl4 pre valve closed
11/21/2012	4:13:13 PM	SiCl4 post valve closed
11/21/2012	4:13:13 PM	Bypass valve closed
11/21/2012	4:13:13 PM	Bubbler valve closed
11/21/2012	4:13:13 PM	Main Vac valve opened
11/21/2012	4:13:13 PM	Helium MFC set to  0.000000
11/21/2012	4:13:13 PM	H2 MFC set to  0.000000
11/21/2012	4:13:13 PM	BCl3 MFC set to  0.000000
11/21/2012	4:13:13 PM	PH3 MFC set to  0.000000
11/21/2012	4:13:13 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:13:13 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:13:13 PM	Tube furnace set to 0
11/21/2012	4:13:14 PM	Run finished at 4:13 PM
11/21/2012	4:13:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2012	4:13:36 PM	Recipe started at 4:13 PM
11/21/2012	4:13:36 PM	Helium valve closed
11/21/2012	4:13:36 PM	H2 valve closed
11/21/2012	4:13:36 PM	BCl3 valve closed
11/21/2012	4:13:36 PM	PH3 valve closed
11/21/2012	4:13:36 PM	SiCl4 pre valve closed
11/21/2012	4:13:36 PM	SiCl4 post valve closed
11/21/2012	4:13:36 PM	Bypass valve closed
11/21/2012	4:13:36 PM	Bubbler valve closed
11/21/2012	4:13:36 PM	Main Vac valve opened
11/21/2012	4:13:36 PM	Helium MFC set to  0.000000
11/21/2012	4:13:36 PM	H2 MFC set to  0.000000
11/21/2012	4:13:36 PM	BCl3 MFC set to  0.000000
11/21/2012	4:13:36 PM	PH3 MFC set to  0.000000
11/21/2012	4:13:36 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:13:36 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:13:36 PM	Tube furnace set to 150
11/21/2012	4:13:37 PM	Run aborted at 4:13 PM
11/21/2012	4:13:37 PM	Helium valve closed
11/21/2012	4:13:37 PM	H2 valve closed
11/21/2012	4:13:37 PM	BCl3 valve closed
11/21/2012	4:13:37 PM	PH3 valve closed
11/21/2012	4:13:37 PM	SiCl4 pre valve closed
11/21/2012	4:13:37 PM	SiCl4 post valve closed
11/21/2012	4:13:37 PM	Bypass valve closed
11/21/2012	4:13:37 PM	Main Vac valve closed
11/21/2012	4:13:37 PM	Bubbler valve closed
11/21/2012	4:13:37 PM	Helium MFC set to  0.000000
11/21/2012	4:13:37 PM	H2 MFC set to  0.000000
11/21/2012	4:13:37 PM	BCl3 MFC set to  0.000000
11/21/2012	4:13:37 PM	PH3 MFC set to  0.000000
11/21/2012	4:13:37 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:13:37 PM	Tube furnace set to 0
11/21/2012	4:14:03 PM	Recipe started at 4:14 PM
11/21/2012	4:14:03 PM	Helium valve closed
11/21/2012	4:14:03 PM	H2 valve closed
11/21/2012	4:14:03 PM	BCl3 valve closed
11/21/2012	4:14:03 PM	PH3 valve closed
11/21/2012	4:14:03 PM	SiCl4 pre valve closed
11/21/2012	4:14:03 PM	SiCl4 post valve closed
11/21/2012	4:14:03 PM	Bypass valve closed
11/21/2012	4:14:03 PM	Bubbler valve closed
11/21/2012	4:14:03 PM	Main Vac valve opened
11/21/2012	4:14:03 PM	Helium MFC set to  0.000000
11/21/2012	4:14:03 PM	H2 MFC set to  0.000000
11/21/2012	4:14:03 PM	BCl3 MFC set to  0.000000
11/21/2012	4:14:03 PM	PH3 MFC set to  0.000000
11/21/2012	4:14:03 PM	SiCl4 MFC set to  0.000000
11/21/2012	4:14:03 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	4:14:04 PM	Tube furnace set to 150
11/21/2012	7:14:04 PM	Helium valve closed
11/21/2012	7:14:04 PM	H2 valve closed
11/21/2012	7:14:04 PM	BCl3 valve closed
11/21/2012	7:14:04 PM	PH3 valve closed
11/21/2012	7:14:04 PM	SiCl4 pre valve closed
11/21/2012	7:14:04 PM	SiCl4 post valve closed
11/21/2012	7:14:04 PM	Main Vac valve closed
11/21/2012	7:14:04 PM	Bypass valve closed
11/21/2012	7:14:04 PM	Bubbler valve closed
11/21/2012	7:14:04 PM	Helium MFC set to  0.000000
11/21/2012	7:14:04 PM	H2 MFC set to  0.000000
11/21/2012	7:14:04 PM	BCl3 MFC set to  0.000000
11/21/2012	7:14:04 PM	PH3 MFC set to  0.000000
11/21/2012	7:14:04 PM	SiCl4 MFC set to  0.000000
11/21/2012	7:14:04 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	7:14:04 PM	Tube furnace set to 0
11/21/2012	7:14:07 PM	Helium valve closed
11/21/2012	7:14:07 PM	BCl3 valve closed
11/21/2012	7:14:07 PM	PH3 valve closed
11/21/2012	7:14:07 PM	SiCl4 pre valve closed
11/21/2012	7:14:07 PM	SiCl4 post valve closed
11/21/2012	7:14:07 PM	Main Vac valve closed
11/21/2012	7:14:07 PM	Bypass valve closed
11/21/2012	7:14:07 PM	Bubbler valve closed
11/21/2012	7:14:07 PM	H2 valve opened
11/21/2012	7:14:07 PM	Helium MFC set to  0.000000
11/21/2012	7:14:07 PM	H2 MFC set to  500.000000
11/21/2012	7:14:07 PM	BCl3 MFC set to  0.000000
11/21/2012	7:14:07 PM	PH3 MFC set to  0.000000
11/21/2012	7:14:07 PM	SiCl4 MFC set to  0.000000
11/21/2012	7:14:07 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	7:14:07 PM	Tube furnace set to 0
11/21/2012	7:15:19 PM	Helium valve closed
11/21/2012	7:15:19 PM	BCl3 valve closed
11/21/2012	7:15:19 PM	PH3 valve closed
11/21/2012	7:15:19 PM	SiCl4 pre valve closed
11/21/2012	7:15:19 PM	SiCl4 post valve closed
11/21/2012	7:15:19 PM	Main Vac valve closed
11/21/2012	7:15:19 PM	Bypass valve closed
11/21/2012	7:15:19 PM	H2 valve opened
11/21/2012	7:15:19 PM	Bubbler valve opened
11/21/2012	7:15:19 PM	Helium MFC set to  0.000000
11/21/2012	7:15:19 PM	H2 MFC set to  500.000000
11/21/2012	7:15:19 PM	BCl3 MFC set to  0.000000
11/21/2012	7:15:19 PM	PH3 MFC set to  0.000000
11/21/2012	7:15:19 PM	SiCl4 MFC set to  0.000000
11/21/2012	7:15:19 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	7:15:20 PM	Tube furnace set to 0
11/21/2012	7:15:21 PM	Helium valve closed
11/21/2012	7:15:21 PM	BCl3 valve closed
11/21/2012	7:15:21 PM	PH3 valve closed
11/21/2012	7:15:21 PM	SiCl4 pre valve closed
11/21/2012	7:15:21 PM	SiCl4 post valve closed
11/21/2012	7:15:21 PM	Main Vac valve closed
11/21/2012	7:15:21 PM	Bypass valve closed
11/21/2012	7:15:21 PM	H2 valve opened
11/21/2012	7:15:21 PM	Bubbler valve opened
11/21/2012	7:15:21 PM	Helium MFC set to  0.000000
11/21/2012	7:15:21 PM	H2 MFC set to  450.000000
11/21/2012	7:15:21 PM	BCl3 MFC set to  0.000000
11/21/2012	7:15:21 PM	PH3 MFC set to  0.000000
11/21/2012	7:15:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	7:15:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	7:15:21 PM	Tube furnace set to 1000
11/21/2012	7:40:21 PM	Helium valve closed
11/21/2012	7:40:21 PM	PH3 valve closed
11/21/2012	7:40:21 PM	Main Vac valve closed
11/21/2012	7:40:21 PM	Bypass valve closed
11/21/2012	7:40:21 PM	H2 valve opened
11/21/2012	7:40:21 PM	BCl3 valve opened
11/21/2012	7:40:21 PM	SiCl4 pre valve opened
11/21/2012	7:40:21 PM	SiCl4 post valve opened
11/21/2012	7:40:21 PM	Bubbler valve opened
11/21/2012	7:40:21 PM	Helium MFC set to  0.000000
11/21/2012	7:40:21 PM	H2 MFC set to  450.000000
11/21/2012	7:40:21 PM	BCl3 MFC set to  1.500000
11/21/2012	7:40:21 PM	PH3 MFC set to  0.000000
11/21/2012	7:40:21 PM	SiCl4 MFC set to  50.000000
11/21/2012	7:40:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	7:40:21 PM	Tube furnace set to 1000
11/21/2012	7:48:21 PM	Helium valve closed
11/21/2012	7:48:21 PM	BCl3 valve closed
11/21/2012	7:48:21 PM	PH3 valve closed
11/21/2012	7:48:21 PM	SiCl4 pre valve closed
11/21/2012	7:48:21 PM	SiCl4 post valve closed
11/21/2012	7:48:21 PM	Main Vac valve closed
11/21/2012	7:48:21 PM	Bypass valve closed
11/21/2012	7:48:21 PM	H2 valve opened
11/21/2012	7:48:21 PM	Bubbler valve opened
11/21/2012	7:48:21 PM	Helium MFC set to  0.000000
11/21/2012	7:48:21 PM	H2 MFC set to  500.000000
11/21/2012	7:48:21 PM	BCl3 MFC set to  0.000000
11/21/2012	7:48:21 PM	PH3 MFC set to  0.000000
11/21/2012	7:48:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	7:48:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	7:48:21 PM	Tube furnace set to 750
11/21/2012	7:53:21 PM	H2 valve closed
11/21/2012	7:53:21 PM	BCl3 valve closed
11/21/2012	7:53:21 PM	PH3 valve closed
11/21/2012	7:53:21 PM	SiCl4 pre valve closed
11/21/2012	7:53:21 PM	SiCl4 post valve closed
11/21/2012	7:53:21 PM	Main Vac valve closed
11/21/2012	7:53:21 PM	Bypass valve closed
11/21/2012	7:53:21 PM	Helium valve opened
11/21/2012	7:53:21 PM	Bubbler valve opened
11/21/2012	7:53:21 PM	Helium MFC set to  500.000000
11/21/2012	7:53:21 PM	H2 MFC set to  0.000000
11/21/2012	7:53:21 PM	BCl3 MFC set to  0.000000
11/21/2012	7:53:21 PM	PH3 MFC set to  0.000000
11/21/2012	7:53:21 PM	SiCl4 MFC set to  0.000000
11/21/2012	7:53:21 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	7:53:21 PM	Tube furnace set to 0
11/21/2012	8:02:37 PM	Helium valve closed
11/21/2012	8:02:37 PM	H2 valve closed
11/21/2012	8:02:37 PM	BCl3 valve closed
11/21/2012	8:02:37 PM	PH3 valve closed
11/21/2012	8:02:37 PM	SiCl4 pre valve closed
11/21/2012	8:02:37 PM	SiCl4 post valve closed
11/21/2012	8:02:37 PM	Main Vac valve closed
11/21/2012	8:02:37 PM	Bypass valve closed
11/21/2012	8:02:37 PM	Bubbler valve closed
11/21/2012	8:02:37 PM	Helium MFC set to  0.000000
11/21/2012	8:02:37 PM	H2 MFC set to  0.000000
11/21/2012	8:02:37 PM	BCl3 MFC set to  0.000000
11/21/2012	8:02:37 PM	PH3 MFC set to  0.000000
11/21/2012	8:02:37 PM	SiCl4 MFC set to  0.000000
11/21/2012	8:02:37 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	8:02:37 PM	Tube furnace set to 0
11/21/2012	8:02:38 PM	Run finished at 8:02 PM
11/21/2012	8:02:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2012	8:02:43 PM	Recipe started at 8:02 PM
11/21/2012	8:02:43 PM	Helium valve closed
11/21/2012	8:02:43 PM	H2 valve closed
11/21/2012	8:02:43 PM	BCl3 valve closed
11/21/2012	8:02:43 PM	PH3 valve closed
11/21/2012	8:02:43 PM	SiCl4 pre valve closed
11/21/2012	8:02:43 PM	SiCl4 post valve closed
11/21/2012	8:02:43 PM	Main Vac valve closed
11/21/2012	8:02:43 PM	Bypass valve closed
11/21/2012	8:02:43 PM	Bubbler valve closed
11/21/2012	8:02:44 PM	Helium MFC set to  0.000000
11/21/2012	8:02:44 PM	H2 MFC set to  0.000000
11/21/2012	8:02:44 PM	BCl3 MFC set to  0.000000
11/21/2012	8:02:44 PM	PH3 MFC set to  0.000000
11/21/2012	8:02:44 PM	SiCl4 MFC set to  0.000000
11/21/2012	8:02:44 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	8:02:44 PM	Tube furnace set to 0
11/21/2012	8:02:47 PM	H2 valve closed
11/21/2012	8:02:47 PM	BCl3 valve closed
11/21/2012	8:02:47 PM	PH3 valve closed
11/21/2012	8:02:47 PM	SiCl4 pre valve closed
11/21/2012	8:02:47 PM	SiCl4 post valve closed
11/21/2012	8:02:47 PM	Main Vac valve closed
11/21/2012	8:02:47 PM	Bypass valve closed
11/21/2012	8:02:47 PM	Bubbler valve closed
11/21/2012	8:02:47 PM	Helium valve opened
11/21/2012	8:02:47 PM	Helium MFC set to  500.000000
11/21/2012	8:02:47 PM	H2 MFC set to  0.000000
11/21/2012	8:02:47 PM	BCl3 MFC set to  0.000000
11/21/2012	8:02:47 PM	PH3 MFC set to  0.000000
11/21/2012	8:02:47 PM	SiCl4 MFC set to  0.000000
11/21/2012	8:02:47 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	8:02:47 PM	Tube furnace set to 0
11/21/2012	8:02:47 PM	Helium valve closed
11/21/2012	8:02:47 PM	H2 valve closed
11/21/2012	8:02:47 PM	BCl3 valve closed
11/21/2012	8:02:47 PM	PH3 valve closed
11/21/2012	8:02:47 PM	SiCl4 pre valve closed
11/21/2012	8:02:47 PM	SiCl4 post valve closed
11/21/2012	8:02:47 PM	Main Vac valve closed
11/21/2012	8:02:47 PM	Bypass valve closed
11/21/2012	8:02:47 PM	Bubbler valve closed
11/21/2012	8:02:47 PM	Helium MFC set to  0.000000
11/21/2012	8:02:47 PM	H2 MFC set to  0.000000
11/21/2012	8:02:47 PM	BCl3 MFC set to  0.000000
11/21/2012	8:02:47 PM	PH3 MFC set to  0.000000
11/21/2012	8:02:47 PM	SiCl4 MFC set to  0.000000
11/21/2012	8:02:47 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	8:02:47 PM	Tube furnace set to 0
11/21/2012	8:02:48 PM	Run finished at 8:02 PM
11/21/2012	8:02:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/21/2012	8:07:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/21/2012	8:07:26 PM	Recipe started at 8:07 PM
11/21/2012	8:07:26 PM	Helium valve closed
11/21/2012	8:07:26 PM	H2 valve closed
11/21/2012	8:07:26 PM	BCl3 valve closed
11/21/2012	8:07:26 PM	PH3 valve closed
11/21/2012	8:07:26 PM	SiCl4 pre valve closed
11/21/2012	8:07:26 PM	SiCl4 post valve closed
11/21/2012	8:07:26 PM	Main Vac valve closed
11/21/2012	8:07:26 PM	Bubbler valve closed
11/21/2012	8:07:27 PM	Bypass valve opened
11/21/2012	8:07:27 PM	Helium MFC set to  0.000000
11/21/2012	8:07:27 PM	H2 MFC set to  0.000000
11/21/2012	8:07:27 PM	BCl3 MFC set to  0.000000
11/21/2012	8:07:27 PM	PH3 MFC set to  0.000000
11/21/2012	8:07:27 PM	SiCl4 MFC set to  0.000000
11/21/2012	8:07:27 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	8:07:27 PM	Tube furnace set to 0
11/21/2012	8:08:38 PM	Helium valve closed
11/21/2012	8:08:38 PM	H2 valve closed
11/21/2012	8:08:38 PM	BCl3 valve closed
11/21/2012	8:08:38 PM	PH3 valve closed
11/21/2012	8:08:38 PM	SiCl4 pre valve closed
11/21/2012	8:08:38 PM	SiCl4 post valve closed
11/21/2012	8:08:38 PM	Main Vac valve closed
11/21/2012	8:08:38 PM	Bubbler valve closed
11/21/2012	8:08:38 PM	Bypass valve opened
11/21/2012	8:08:38 PM	Helium MFC set to  0.000000
11/21/2012	8:08:38 PM	H2 MFC set to  0.000000
11/21/2012	8:08:38 PM	BCl3 MFC set to  0.000000
11/21/2012	8:08:38 PM	PH3 MFC set to  0.000000
11/21/2012	8:08:38 PM	SiCl4 MFC set to  0.000000
11/21/2012	8:08:38 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	8:08:38 PM	Tube furnace set to 0
11/21/2012	8:09:38 PM	Helium valve closed
11/21/2012	8:09:38 PM	H2 valve closed
11/21/2012	8:09:38 PM	BCl3 valve closed
11/21/2012	8:09:38 PM	PH3 valve closed
11/21/2012	8:09:38 PM	SiCl4 pre valve closed
11/21/2012	8:09:38 PM	SiCl4 post valve closed
11/21/2012	8:09:38 PM	Bypass valve closed
11/21/2012	8:09:38 PM	Bubbler valve closed
11/21/2012	8:09:39 PM	Main Vac valve opened
11/21/2012	8:09:39 PM	Helium MFC set to  0.000000
11/21/2012	8:09:39 PM	H2 MFC set to  0.000000
11/21/2012	8:09:39 PM	BCl3 MFC set to  0.000000
11/21/2012	8:09:39 PM	PH3 MFC set to  0.000000
11/21/2012	8:09:39 PM	SiCl4 MFC set to  0.000000
11/21/2012	8:09:39 PM	Bypass solenoid MFC set to  0.000000
11/21/2012	8:09:39 PM	Tube furnace set to 0
11/21/2012	8:09:40 PM	Run finished at 8:09 PM
11/21/2012	8:09:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
